Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators

IEEE MTT-S International Microwave Symposium Digest

Volumn 4, Issue , 1999, Pages 1507-1510

  Feng, Zhiping ^a   Zhang, Wenge ^a   Su, Bingzhi ^a   Harsh, Kevin F ^a   Gupta, K C ^a   Bright, V ^a   Lee, Y C ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINA; CAPACITANCE; FLIP CHIP DEVICES; INTEGRATED CIRCUIT LAYOUT; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; SCATTERING PARAMETERS; THERMAL EXPANSION; TUNING; WAVEGUIDES;

BIAS VOLTAGE; ELECTROTHERMAL ACTUATORS; FLIP CHIP TRANSFER TECHNOLOGY; RADIO FREQUENCY LOSSES; TUNABLE CAPACITOR; Y-PARAMETERS;

CAPACITORS;

EID: 0033362788     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)