Micromechanical tuning elements in a 620-GHz monolithic integrated circuit

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 12 PART 1, 1998, Pages 2098-2103

  Lubecke, Victor M ^a   McGrath, William R ^b,c   Stimson, Philip A ^c   Rutledge, David B ^d  

^a California Institute of Technology   (United States)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^d DEFENCE SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Micromachining; Submillimeter waves; Tuners

Indexed keywords

ANTENNAS; BISMUTH; DETECTOR CIRCUITS; DETECTORS; ELECTROMAGNETIC WAVE REFLECTION; MICROMACHINING; MICROWAVE MEASUREMENT; MILLIMETER WAVE DEVICES; THIN FILM DEVICES; TUNING;

SLIDING PLANAR BACKSHORTS (SPB) TUNERS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 0032291249     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.739288     Document Type: Article

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