An atmospheric pressure inductively coupled microplasma source of vacuum ultraviolet light

Sensors and Actuators, A: Physical

Volumn 215, Issue , 2014, Pages 144-149

  Sato, Ryoto ^a   Yasumatsu, Daisuke ^a   Kumagai, Shinya ^a   Takeda, Keigo ^b   Hori, Masaru ^b   Sasaki, Minoru ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Atmospheric pressure inductively coupled microplasma; Easy ignition; Plasma chip; Vacuum ultraviolet light source

Indexed keywords

ANTENNAS; ATMOSPHERIC PRESSURE; ELECTROMAGNETIC INDUCTION; LIGHT SOURCES; METAMATERIALS; OPTICAL SYSTEMS; QUARTZ; VACUUM;

AMBIENT CONDITIONS; ELECTRICAL POTENTIAL; INDUCTIVELY-COUPLED; MEMS TECHNOLOGY; MICROPLASMA SOURCE; PLASMA IGNITION; QUARTZ CAPILLARY TUBE; VACUUM ULTRAVIOLET LIGHT;

PLASMA DEVICES;

EID: 84903315659     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.09.018     Document Type: Article

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