Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 205-208

  Yamasaki, Hidetaka ^a   Terao, Kyohei ^a   Suzuki, Takaaki ^a   Simokawa, Fusao ^a   Takao, Hidekuni ^a  

^a KAGAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE PLASMA JETS; DISCHARGE ELECTRODE; EVALUATION RESULTS; FABRICATED DEVICE; MICROFLUIDIC CHANNEL; PDMS MICROCHANNELS; SPATIAL RESOLUTION; STARTING VOLTAGES;

ELECTRODES; FABRICATION; FLUIDIC DEVICES; GLASS BONDING; MEMS; MICROCHANNELS; PLASMA JETS; WAFER BONDING;

ELECTRIC DISCHARGES;

EID: 84875457672     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474213     Document Type: Conference Paper

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