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Applied Physics Letters

Volumn 104, Issue 23, 2014, Pages

Mechanical anomaly impact on metal-oxide-semiconductor capacitors on flexible silicon fabric

(5) Ghoneim, M T a Kutbee, A a Ghodsi Nasseri, F a Bersuker, G b Hussain, M M a

a KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY (Saudi Arabia)

b SEMATECH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING TESTS; CAPACITORS; DIELECTRIC DEVICES; ELECTRIC BREAKDOWN; SILICON;

BENDING RADIUS; MECHANICAL ANOMALIES; MECHANICAL STRESS; METAL-OXIDE-SEMICONDUCTOR CAPACITORS; SILICON (100);

STRESSES;

EID: 84902504002 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4882647 Document Type: Article

Times cited : (30)

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