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Volumn 3, Issue 9, 2010, Pages 1051-1056
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Thin-film composite materials as a dielectric layer for flexible metal-insulator-metal capacitors
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Author keywords
block copolymers; green chemistry; nanotechnology; sol gel processes; thin films
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Indexed keywords
BLOCK COPOLYMERS;
CAPACITANCE;
CAPACITORS;
COPOLYMERIZATION;
GELS;
GOLD COATINGS;
METAL INSULATOR BOUNDARIES;
METALS;
MIM DEVICES;
NANOSTRUCTURED MATERIALS;
PERMITTIVITY;
POLYIMIDES;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR INSULATOR BOUNDARIES;
SOL-GEL PROCESS;
SOLS;
THIN FILMS;
VAN DER WAALS FORCES;
VAPOR DEPOSITION;
1-BROMOADAMANTANE;
ATOMIC FORCE MICROSCOPES;
CRACK FREE;
DIELECTRIC CONSTANTS;
DIELECTRIC LAYER;
ELECTRICAL PROPERTY;
FLEXIBLE ELECTRONIC DEVICES;
FLEXIBLE POLYIMIDE;
GREEN CHEMISTRY;
INSULATING PROPERTIES;
INTER-METAL DIELECTRICS;
LEAKAGE CURRENT MEASUREMENTS;
LOW-LEAKAGE CURRENT;
METAL-INSULATOR-METAL CAPACITORS;
MOISTURE ABSORPTION;
NANO SCALE;
ORGANIC ADDITIVES;
PLURONICS;
PRECURSOR SOLUTIONS;
ROOM TEMPERATURE;
SCANNING ELECTRON MICROSCOPE;
SOLUTION DEPOSITION;
TRIBLOCK COPOLYMERS;
VAN DER WAALS INTERACTIONS;
DIELECTRIC MATERIALS;
METAL;
NANOCOMPOSITE;
ARTICLE;
CHEMISTRY;
ELECTRIC CAPACITANCE;
ELECTRONICS;
INSTRUMENTATION;
MATERIALS TESTING;
SURFACE PROPERTY;
ELECTRIC CAPACITANCE;
ELECTRONICS;
MATERIALS TESTING;
METALS;
NANOCOMPOSITES;
SURFACE PROPERTIES;
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EID: 78650762823
PISSN: 18645631
EISSN: 1864564X
Source Type: Journal
DOI: 10.1002/cssc.201000118 Document Type: Article |
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Times cited : (15)
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References (17)
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