Extremely flexible nanoscale ultrathin body silicon integrated circuits on plastic

Nano Letters

Volumn 13, Issue 1, 2013, Pages 315-320

  Shahrjerdi, Davood ^a   Bedell, Stephen W ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Flexible electronics; integrated circuits; mechanical flexibility; thin film transistors; ultrathin body silicon

Indexed keywords

FLEXIBLE CIRCUIT; FLEXIBLE DEVICE; HIGH PERFORMANCE DEVICES; HIGHLY INTEGRATED; MECHANICAL FLEXIBILITY; MEMORY CELL; NANO SCALE; NANOSCALE MATERIALS AND STRUCTURES; NANOSCALE TRANSISTORS; PACKING DENSITY; PLASTIC SUBSTRATES; POWER SUPPLY VOLTAGE; RING OSCILLATOR; ROOM TEMPERATURE; SEMICONDUCTOR NANOWIRE; SILICON DEVICES; SILICON INTEGRATED CIRCUITS; SILICON TECHNOLOGIES; SYSTEM COMPLEXITY; ULTRA-LIGHT; ULTRATHIN BODY;

AMORPHOUS SEMICONDUCTORS; DELAY CIRCUITS; FLEXIBLE ELECTRONICS; GRAPHENE; INTEGRATED CIRCUITS; NANOELECTRONICS; NANOWIRES; THIN FILM TRANSISTORS;

SILICON;

EID: 84872111074     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl304310x     Document Type: Article

References (31)

1. Gustafsson, G.; Cao, Y.; Treacy, G. M.; Klavetter, F.; Colaneri, N.; Heeger, A. J. Nature 1992, 357, 477-479
2. Nomura, K.; Ohta, H.; Takagi, A.; Kamiya, T.; Hirano, M.; Hosono, H. Nature 2004, 432, 488-492
3. Klauk, H.; Halik, M.; Zschieschang, U.; Eder, F.; Schmid, G.; Dehm, C. Appl. Phys. Lett. 2003, 82, 4175-4177
4. Hoppea, H.; Sariciftci, N. S. J. Mater. Res. 2004, 19, 1924-1945
5. Ichikawa, Y.; Yoshida, T.; Hama, T.; Sakai, H.; Harashima, K. Solar Energy Mater. Solar Cells 2001, 66, 107-115
6. Sekitani, T.; Yokota, T.; Zschieschang, U.; Klauk, H.; Bauer, S.; Takeuchi, K.; Takamiya, M.; Sakurai, T.; Someya, T. Science 2009, 326, 1516-1519
7. Someya, T.; Sekitani, T.; Iba, S.; Kato, Y.; Kawaguchi., H.; Sakurai, T. Proc. Natl. Acad. Sci. U.S.A. 2004, 101, 9966-9970
8. Forrest, S. R. Nature 2004, 428, 911-918
9. Gundlach, D. J.; Lin, Y. Y.; Jackson, T. N.; Nelson, S. F.; Schlom, D. G. IEEE Electron. Dev. Lett. 1997, 18, 87-89
10. Kelley, T. W.; Baude, P. F.; Gerlach, C.; Ender, D. E.; Muyres, D.; Haase, M. A.; Vogel, D. E.; Theiss, S. D. Chem. Mater. 2004, 16, 4413-4422
11. Theiss, S. D.; Wagner, S. IEEE Electron. Dev. Lett. 1996, 17, 578-580
12. Hekmatshoar, B.; Cherenack, K. H.; Kattamis, A. Z.; Long, K.; Wagner, S.; Sturm, J. C. Appl. Phys. Lett. 2008, 93, 032103-1-032103-3
13. Duan, X.; Niu, C.; Sahi, V.; Chen, J.; Parce, J. W.; Empedocles, S.; Goldman, J. L. Nature 2003, 425, 274-278
14. Mack, S.; Meitl, M. A.; Baca, A. J.; Zhu, Z.-T.; Rogers, J. A. Appl. Phys. Lett. 2006, 88, 213101-1-213101-3
15. Bradley, K.; Gabriel, J.-C. P.; Grüner, G. Nano Lett. 2003, 3, 1353-1355
16. Artukovic, E.; Kaempgen, M.; Hecht, D. S.; Roth, S.; Grüner, G. Nano Lett. 2005, 5, 757-760
17. Li, H. Y.; Guo, L. H.; Loh, W. Y.; Bera, L. K.; Zhang, Q. X.; Hwang, N.; Liao, E. B.; Teoh, K. W.; Chua, H. M.; Shen, Z. X.; Cheng, C. K.; Lo, G. Q.; Balasubramanian, N.; Kwong, D.-L. IEEE Electron. Dev. Lett. 2006, 27, 538-541
18. Xu, Y.; Tai, Y.-C.; Huang, A.; Ho, C.-M. Solid-State Sensor, Actuator Microsyst. Workshop 2002, 354-357
19. Yoon, J.; Jo, S.; Chun, I. S.; Jung, I.; Kim, H.-S.; Meitl, M.; Menard, E.; Li, X.; Coleman, J. J.; Paik, U.; Rogers, J. A. Nature 2010, 465, 329-333
20. Yu, G.; Cao, A.; Lieber, C. M. Nat. Nanotechnol. 2007, 2, 372-377
21. Yonehara, T.; Sakaguchi, K. Jpn. Soc. Appl. Phys. Int. 2001, 4, 10-16
22. Burghartz, J. N.; Appel, W.; Rempp, H. D.; Zimmermann, M. IEEE Trans. Electron. Dev. 2009, 56, 321-327
23. Konagai, M.; Sugimoto, M.; Takahashi, K. J. Cryst. Growth 1978, 45, 277-280
24. Menard, E.; Lee, K. J.; Khang, D.-Y.; Nuzzo, R. G.; Rogersa, J. A. Appl. Phys. Lett. 2004, 84, 5398-5400
25. Choi, Y.-K.; Asano, K.; Lindert, N.; Subramanian, V.; King, T.-J.; Bokor, J.; Hu, C. IEEE Int. Electron. Dev. Mtg. Tech. Dig. 1999, 919-921
26. Cheng, K.; Khakifirooz, A. VLSI Tech. Dig. 2011, 128-129
27. Bedell, S. W.; Shahrjerdi, D.; Hekmatshoar, B.; Fogel, K.; Lauro, P. A.; Ott, J. A.; Sosa, N.; Sadana, D. IEEE J. Photovoltaics 2012, 2, 141-147
28. Bedell, S. W.; Shahrjerdi, D.; Fogel, K.; Lauro, P. A.; Hekmatshoar, B.; Li, N.; Bayram, C.; Ott, J. A.; Sosa, N.; Sadana, D. Trans. Electrochem. Soc. 2012, in press.
29. Suo, Z.; Hutchinson, J. W. Int. J. Solid Struct. 1989, 25, 1337-1353
30. Lim, J.-S.; Thompson, S. E.; Fossum, J. G. IEEE Electron. Dev. Lett. 2004, 25, 731-733
31. Zhao, W.; He, J.; Belford, R. E.; Wernersson, L. E.; Seabaugh, A. IEEE Trans. Electron. Dev. 2003, 51, 317-323