Fabrication of 1D ZnO nanostructures on MEMS cantilever for VOC sensor application

Sensors and Actuators, B: Chemical

Volumn 202, Issue , 2014, Pages 357-364

  Kilinc, Necmettin ^a,b,c   Cakmak, Onur ^a   Kosemen, Arif ^b,d   Ermek, Erhan ^a   Ozturk, Sadullah ^b   Yerli, Yusuf ^b,e   Ozturk, Zafer Ziya ^b   Urey, Hakan ^a  

^a KOÇ UNIVERSITY   (Turkey)

^b GEBZE TECHNICAL UNIVERSITY   (Turkey)

^c NIGDE UNIVERSITY   (Turkey)

^d MU ALPARSLAN UNIVERSITY   (Turkey)

^e YILDIZ TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Chemical sensors; Microelectromechanical systems; Nanorods; Nanotubes; VOC sensing; Zinc oxide

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; FABRICATION; MEMS; NANOCANTILEVERS; NANORODS; NANOTUBES; NATURAL FREQUENCIES; NICKEL;

EFFECTIVE SURFACE AREA; HYDROTHERMAL ETCHING; LIMIT OF DETECTION; MAGNETIC ACTUATION; SENSING PERFORMANCE; SENSOR APPLICATIONS; STANDARD LITHOGRAPHIES; SURFACE-TO-VOLUME RATIO;

ZINC OXIDE;

EID: 84902489808     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.05.078     Document Type: Article

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