A VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods

17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013

Volumn 3, Issue , 2013, Pages 1529-1531

  Kilinc, N ^a,b   Cakmak, O ^a   Kosemen, A ^b,c   Ermek, E ^a   Ozturk, S ^b   Yerli, Y ^b   Ozturk, Z Z ^b   Urey, H ^a  

^a KOÇ UNIVERSITY   (Turkey)

^b GEBZE TECHNICAL UNIVERSITY   (Turkey)

^c MU ALPARSLAN UNIVERSITY   (Turkey)

Author keywords

Electrodeposition; Micromechanical sensor; VOC sensing; ZnO nanorod

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTRODEPOSITION; NANORODS; VOLATILE ORGANIC COMPOUNDS;

ELECTRODEPOSITION PROCESS; LIMIT OF DETECTION; MAGNETIC ACTUATION; MICRO-CANTILEVERS; MICROMECHANICAL CANTILEVERS; MICROMECHANICAL SENSORS; VOLATILE ORGANIC COMPOUND (VOC); ZNO NANOROD;

ZINC OXIDE;

EID: 84902495016     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. P. S. Waggoner and H. G. Craighead, Lab on a Chip, vol. 7, no. 10, pp. 1238-1255, 2007.
2. K. L. Ekinci, Y. T. Yang and M. L. Roukes, Journal of Applied Physics, vol. 95 no. 5, pp. 2682-2689, 2004.
3. A. Ozturk, H. I. Ocakli, N. Ozber, H. Urey, I. H. Kavakli and B. E. Alaca, IEEE Photonics Technology Letters, vol. 20 no. 21-24, pp. 1905-1907, 2008.
4. E. Timurdogan, B. E. Alaca, I. H. Kavakli and H. Urey, Biosensors & Bioelectronics, vol. 28 no. 1, pp. 189-194, 2011.
5. Y. Hames, Z. Alpaslan, A. Kosemen, S. E. San and Y. Yerli, Solar Energy, vol. 84 no. 3, pp. 426-431, 2010.