A magnetically actuated resonant mass sensor with integrated optical readout

IEEE Photonics Technology Letters

Volumn 20, Issue 23, 2008, Pages 1905-1907

  Ozturk, Alibey ^a   Ocakli, H Ilker ^a   Ozber, Natali ^a   Urey, Hakan ^a   Kavakli, I Halil ^a   Alaca, B Erdem ^a  

^a KOÇ UNIVERSITY   (Turkey)

Author keywords

Interferometry; Magnetic films; Microelectromechanical devices; Resonators

Indexed keywords

MAGNETIC MATERIALS; OPTICAL SENSORS; SENSORS; SIGNAL TO NOISE RATIO;

BIOSENSING; DOPPLER; ENVIRONMENTAL NOISES; EXTERNAL-; FABRICATION DEFECTS; LITHOGRAPHIC PROCESSES; MICROARRAY TECHNOLOGIES; MICROOPTICAL; NICKEL CANTILEVERS; OPERATION PRINCIPLES; OPIOID RECEPTORS; OPTICAL READOUTS; PORTABLE SENSORS; RESONANT MASS SENSORS; SIGNAL-TO-NOISE RATIOS; SYSTEMS INTEGRATIONS; VIBROMETER;

MICROELECTROMECHANICAL DEVICES;

EID: 57049106308     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2008.2005253     Document Type: Article

References (8)

1. C. Ziegler, "Cantilever-based biosensors," Anal. Bioanal. Chem., vol. 379, pp. 946-959, 2004.
2. K. K. Park, H. J. Lee, G. G. Yaralioglu, A. S. Ergun, Ö. Oralkan, M. Kupnik, C. F. Quate, B. T. Khuri-Yakub, T. Braun, J.-P. Ramseyer, H. P. Lang, M. Hegner, C. Gerber, and J. K. Gimzewski, "Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen," Appl. Phys. Lett., vol. 91, no. 094102, 2007.
3. A. Gupta, D. Akin, and R. Bashir, "Single virus particle mass detection using microresonators with nanoscale thickness," Appl. Phys. Lett. vol. 84, no. 11, pp. 1976-1978, 2004.
4. K. L. Ekinci, X. M. H. Huang, and M. L. Roukes, "Ultrasensitive nanoelectromechanical mass detection," Appl. Phys. Lett., vol. 84, no. 22, pp. 4469-4471, 2004.
5. S. O. Isikman, O. Ergeneman, A. D. Yalcinkaya, and H. Urey, "Modeling and characterization of soft magnetic film actuated 2-D scanners," IEEE J. Sel. Topics Quantum Electron., vol. 12, no. 2, pp. 283-289, Mar./Apr. 2007.
6. O. Ferhanoglu, M. F. Toy, and H. Urey, "Two-wavelength grating interferometry for MEMS sensors," IEEE Photon. Technol. Lett., vol. 19, no. 23, pp. 1895-1897, Dec. 1, 2007.
7. N. A. Hall and F. L. Degertekin, "Integrated optical interferometric detection method for micromachined capacitive acoustic transducers," Appl. Phys. Lett., vol. 80, no. 20, pp. 3859-3861, 2002.
8. S. A. Trammell, L. Wang, J. M. Zullo, R. Shashidhar, and N. Lebedev, "Orientated binding of photosynthetic reaction centers on gold using Ni-NTS self-assembled monolayers," Biosens. Bioelectron., vol. 19, pp. 1649-1655, 2004.