An In-plane approximated nonlinear MEMS electromagnetic energy harvester

Journal of Microelectromechanical Systems

Volumn 23, Issue 3, 2014, Pages 740-749

  Liu, Huicong ^a   Qian, You ^a   Wang, Nan ^a   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electromagnetic energy harvester; In plane; MEMS; Nonlinear.

Indexed keywords

ENERGY HARVESTING; MEMS; NATURAL FREQUENCIES;

DESIGN METHODOLOGY; HARDENING EFFECTS; HIGHER FREQUENCIES; IN-PLANE; NONLINEAR; OPERATING FREQUENCY; POWER DENSITIES; SUSPENSION STRUCTURE;

ELECTROMAGNETIC WAVES;

EID: 84901952572     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2281736     Document Type: Article

References (63)

1. S. Roundy, P. K. Wright, and J. M. Rabaey, Energy Scavenging forWireless Sensor Networks, 1st ed. Boston, MA, USA: Kluwer, 2003.
2. V. Raghunathan, S. Ganeriwal, and M. Srivastava, "Emerging techniquesfor long lived wireless sensor networks, " IEEE Commun. Mag., vol. 44, no. 4, pp. 108-114, Apr. 2006. (Pubitemid 43792676)
3. C. O. Mathuna, T. O'Donnell, R. V. Martinez-Catala, J. Rohan, andB. O'Flynn, "Energy scavenging for long-term deployable wirelesssensor networks, " Talanta, vol. 75, no. 3, pp. 613-623, 2008.
4. P. D. Mitcheson, E. M. Yeatman, G. K. Rao, A. S. Holmes, andT. C. Green, "Energy harvesting from human and machine motion forwireless electronic devices, " Proc. IEEE, vol. 96, no. 9, pp. 1457-1486, Sep. 2008.
5. P. D. Mitcheson, T. C. Green, E. M. Yeatman, and A. S. Holmes, "Architectures for vibration-driven micropower generators, " J. Microelectromech.Syst., vol. 13, no. 3, pp. 429-440, Jun. 2004.
6. D. Shen, J.-H. Park, J. Ajitsaria, S.-Y. Choe, H.-C. Wikle, and D. J. Kim, "The design, fabrication and evaluation of a MEMS PZT cantileverwith an integrated Si proof mass for vibration energy harvesting, "J. Micromech. Microeng., vol. 18, no. 5, pp. 055017-055023, 2008.
7. R. Elfrink, T. M. Kamel, M. Goedbloed, S. Matova, D. Hohlfeld, Y. van Andel, and R. van Schaijk, "Vibration energy harvesting withaluminum nitride-based piezoelectric devices, " J. Micromech. Microeng., vol. 19, no. 9, pp. 094005-1-094005-8, 2009.
8. B. S. Lee, S. C. Lin, W. J. Wu, X. Y. Wang, P. Z. Chang, andC. K. Lee, "Piezoelectric MEMS generators fabricated with an aerosoldeposition PZT thin film, " J. Micromech. Microeng., vol. 19, no. 6, pp. 065014-1-065014-8, 2009.
9. J. C. Park, J. Y. Park, and Y. P. Lee, "Modeling and characterization ofpiezoelectric d33-mode MEMS energy harvester, " J. Microelectromech.Syst., vol. 19, no. 5, pp. 1215-1222, Oct. 2010.
10. T.-T. Yen, T. Hirasawa, P. K. Wright, A. P. Pisano, and L. Lin, "Corrugated aluminum nitride energy harvesters for high energyconversion effectiveness, " J. Micromech. Microeng., vol. 21, no. 8, pp. 085037-1-085037-9, 2011.
11. E. E. Aktakka, R. L. Peterson, and K. Najafi, "Thinned-PZT on SOIprocess and design optimization for piezoelectric inertial energy harvesting, "in Proc. IEEE 16th Int. Solid-State Sensors, Actuat. Microsyst.Conf., Jun. 2011, pp. 1649-1652.
12. S. Kulkarni, E. Koukharenko, R. Torah, J. Tudor, S. Beeby, T. O'Donnell, and S. Roy, "Design, fabrication and test of integratedmicro-scale vibration-based electromagnetic generator, " Sens. ActuatorsA, Phys., vols. 145-146, nos. 1-2, pp. 336-342, 2008.
13. B. Yang, C. Lee, W. Xiang, J. Xie, J. H. He, R. K. Kotlanka, S. P. Low, and H. Feng, "Electromagnetic energy harvesting fromvibrations of multiple frequencies, " J. Micromech. Microeng., vol. 19, no. 3, pp. 035001-1-035001-8, 2009.
14. F. Khan, F. Sassani, and B. Stoeber, "Copper foil-type vibration-basedelectromagnetic energy harvester, " J. Micromech. Microeng., vol. 20, no. 12, pp. 125006-1-125006-11, 2010.
15. H. Liu, B. W. Soon, N. Wang, C. J. Tay, C. Quan, and C. Lee, "Feasibilitystudy of a 3D vibration-driven electromagnetic MEMS energyharvester with multiple vibration modes, " J. Micromech. Microeng., vol. 22, no. 12, pp. 125020-1-125020-11, 2012.
16. P. Basset, D. Galayko, A. M. Paracha, F. Marty, A. Dudka, andT. Bourouina, "A batch-fabricated and electret-free silicon electrostaticvibration energy harvester, " J. Micromech. Microeng., vol. 19, no. 11, pp. 115025-115036, 2009.
17. Y. Suzuki, "Recent progress in MEMS electret generator for energyharvesting, " IEEJ Trans. Electr. Electron. Eng., vol. 6, no. 2, pp. 101-111, 2011.
18. T. Masaki, K. Sakurai, T. Yokoyama, M. Ikuta, H. Sameshima, M. Doi, T. Seki, and M. Oba, "Power output enhancement of avibration-driven electret generator for wireless sensor applications, "J. Micromech. Microeng., vol. 21, no. 10, pp. 104004-1-104004-5, 2011.
19. Y. Feng, K. Hagiwara, Y. Iguchi, and Y. Suzuki, "Trench-filled cellularparylene electret for piezoelectric transducer, " Appl. Phys. Lett., vol. 100, no. 26, pp. 262901-1-262901-4, 2012.
20. S. Roundy, P. K. Wright, and J. Rabaey, "A study of low level vibrationsas a power source for wireless sensor nodes, " Comput. Commun., vol. 26, no. 11, pp. 1131-1144, 2003.
21. E. Reilly, L. Miller, R. Fain, and P. K. Wright, "A study of ambientvibrations for piezoelectric energy conversion, " in Proc. PowerMEMS, 2009, pp. 312-315.
22. L. M. Miller, E. Halvorsen, T. Dong, and P. K. Wright, "Modeling andexperimental verification of low-frequency MEMS energy harvestingfrom ambient vibrations, " J. Micromech. Microeng., vol. 21, no. 4, pp. 045029-1-045029-13, 2011.
23. X. Wu, J. Lin, S. Kato, K. Zhang, T. Ren, and L. Liu, "A frequencyadjustable vibration energy harvester, " in Proc. PowerMEMS, 2008, pp. 245-248.
24. V. R. Challa, M. G. Prasad, Y. Shi, and F. T. Fisher, "A vibration energyharvesting device with bidirectional resonance frequency tunability, "Smart Mater. Struct., vol. 17, no. 1, pp. 015035-1-015035-10, 2008.
25. E. S. Leland and P. K. Wright, "Resonance tuning of piezoelectric vibrationenergy scavenging generators using compressive axial preload, "Smart Mater. Struct., vol. 15, no. 5, pp. 1413-1420, 2006.
26. H. Xue, Y. Hu, and Q. M. Wang, "Broadband piezoelectric energyharvesting devices using multiple bimorphs with different operatingfrequencies, " IEEE Trans. Ultrason., Ferroelectr. Freq. Control, vol. 55, no. 9, pp. 2104-2108, Sep. 2008.
27. M. Ferrari, V. Ferrari, M. Guizzetti, D. Marioli, and A. Taroni, "Piezoelectric multifrequency energy converter for power harvesting inautonomous microsystems, " Sens. Actuators A, Phys., vol. 142, no. 1, pp. 329-335, 2008. (Pubitemid 351199597)
28. I. Sari, T. Balkan, and H. Kulah, "An electromagnetic micro energyharvester based on an array of parylene cantilevers, " J. Micromech.Microeng., vol. 19, no. 10, pp. 105032-105035, 2009.
29. M. S. M. Soliman, E. M. Abdel-Rahman, E. F. El-Saadany, andR. R. Mansour, "A wideband vibration-based energy harvester, "J. Micromech. Microeng., vol. 18, no. 11, pp. 115021-1-115021-11, 2008.
30. M. S. M. Soliman, E. M. Abdel-Rahman, E. F. El-Saadany, andR. R. Mansour, "A design procedure for wideband micropower generators, "J. Microelectromech. Syst., vol. 18, no. 6, pp. 1288-1299, Dec. 2009.
31. G. Sebald, H. Kuwano, D. Guyomar, and B. Ducharne, " Experimentalduffing oscillator for broadband piezoelectric energy harvesting, " SmartMater. Struct., vol. 20, no. 10, pp. 102001-102010, 2011.
32. A. Narimani, M. F. Golnaraghi, and G. N. Jazar, "Frequency responseof a piecewise linear vibration isolator, " J. Vib. Control, vol. 10, no. 12, pp. 1775-1794, 2004. (Pubitemid 40061329)
33. H. Liu, C. J. Tay, C. Quan, T. Kobayashi, and C. Lee, "PiezoelectricMEMS energy harvester for low-frequency vibrations with widebandoperation range and steadily increased output power, " J. Microelectromech.Syst., vol. 20, no. 5, pp. 1131-1142, Oct. 2011.
34. H. Liu, C. Lee, T. Kobayashi, C. J. Tay, and C. Quan, "A newS-shaped MEMS PZT cantilever for energy harvesting from low frequencyvibrations below 30 Hz, " Microsyst. Technol., vol. 18, no. 4, pp. 497-506, 2012.
35. H. Liu, C. Lee, T. Kobayashi, C. J. Tay, and C. Quan, "Investigationof a MEMS piezoelectric energy harvester system with a frequencywidened-bandwidth mechanism introduced by mechanical stoppers, "Smart Mater. Struct., vol. 21, no. 3, pp. 035005-1-035005-122, 2012.
36. B. P. Mann and N. D. Sims, "Energy harvesting from the nonlinearoscillations of magnetic levitation, " J. Vib. Control, vol. 319, nos. 1-2, pp. 515-530, 2009.
37. A. Erturk, J. Hoffmann, and D. J. Inman, "A piezomagnetoelasticstructure for broadband vibration energy harvesting, " Appl. Phys. Lett., vol. 94, no. 25, pp. 254102-1-254102-3, 2009.
38. X. Xing, J. Lou, G. M. Yang, O. Obi, C. Driscoll, and N. X. Sun, "Wideband vibration energy harvester with high permeability magneticmaterial, " Appl. Phys. Lett., vol. 95, no. 13, pp. 134103-1-134103-3, 2009.
39. B. And'o, S. Baglio, C. Trigona, N. Dumas, L. Latorre, andP. Nouet, "Nonlinear mechanism in MEMS devices for energy harvestingapplications, " J. Micromech. Microeng., vol. 20, no. 12, pp. 125020-1-125020-12, 2010.
40. S. C. Stanton, C. C. McGehee, and B. P. Mann, "Reversible hysteresisfor broadband magnetopiezoelastic energy harvesting, " Appl. Phys. Lett., vol. 95, no. 17, pp. 174103-1-174103-3, 2009.
41. L. Tang and Y. Yang, "A nonlinear piezoelectric energy harvesterwith magnetic oscillator, " Appl. Phys. Lett., vol. 101, no. 9, pp. 094102-1-094102-4, 2012.
42. A. Hajaji and S.-G. Kim, "Ultra-wide bandwidth piezoelectric energyharvesting, " Appl. Phys. Lett., vol. 99, no. 8, pp. 083105-1-083105-3, 2011.
43. M. Marzencki, M. Defosseux, and S. Basrour, "MEMS vibrationenergy harvesting devices with passive resonance frequency adaptationcapability, " J. Microelectromech. Syst., vol. 18, no. 6, pp. 1444-1453, Dec. 2009.
44. L. G. W. Tvedt, D. S. Nguyen, and E. Halvorsen, "Nonlinear behaviorof an electrostatic energy harvester under wide-and narrowband excitation, "J. Microelectromech. Syst., vol. 19, no. 2, pp. 305-316, Apr. 2010.
45. D. Miki, M. Honzumi, Y. Suzuki, and N. Kasagi, "Large-amplitudeMEMS electret generator with nonlinear spring, " in Proc. IEEE 23rdInt. Conf. MEMS, Jan. 2010, pp. 176-179.
46. D. S. Nguyen, E. Halvorsen, G. U. Jensen, and A. Vogl, "Fabricationand characterization of a wideband MEMS energy harvesterutilizing nonlinear springs, " J. Micromech. Microeng., vol. 20, no. 12, pp. 125009-125019, 2010.
47. D. S. Nguyen and E. Halvorsen, "Nonlinear springs for bandwidthtolerantvibration energy harvesting, " J. Microelectromech. Syst., vol. 20, no. 6, pp. 1225-1227, Dec. 2011.
48. D. S. Nguyen, E. Halvorsen, and G. U. Jensen, "Wideband MEMSenergy harvester driven by colored noise, " J. Microelectromech. Syst., vol. 22, no. 4, pp. 892-900, Aug. 2013.
49. C. Shearwood and R. B. Rates, "Development of an electromagneticmicrogenerator, " Electron. Lett., vol. 33, no. 22, pp. 1883-1884, 1997.
50. N. N. H. Ching, H. Y. Wong, W. J. Li, P. H. W. Leong, and Z. Wen, "A laser-micromachined multi-modal resonating power transducer forwireless sensing systems, " Sens. Actuators A, Phys., vols. 97-98, pp. 685-690, Apr. 2002. (Pubitemid 34758783)
51. M. Mizuno and D. G. Chetwynd, "Investigation of a resonance microgenerator, "J. Micromech. Microeng., vol. 13, no. 2, pp. 209-216, 2003.
52. T. Zhang, C. Jiang, H. Xu, and J. Mao, "Permanent-magnet longitudinalfields for magnetostrictive devices, " J. Appl. Phys., vol. 101, no. 3, pp. 034511-1-034511-3, 2007.
53. P. Glynne-Jones, M. J. Tudor, S. P. Beeby, N. M. White, and P. French, "An electromagnetic, vibration-powered generator for intelligent sensorsystems, " Sens. Actuators A, Phys., vol. 110, nos. 1-3, pp. 344-349, 2004.
54. E. Koukharenko, S. P. Beeby, M. J. Tudor, N. M. White, T. O'Donnell, C. Saha, S. Kulkarni, and S. Roy, "Microelectromechanical systemsvibration powered electromagnetic generator for wireless sensor applications, "Microsyst. Technol., vol. 12, nos. 10-11, pp. 1071-1077, 2006. (Pubitemid 44268002)
55. C. T. Pan, Y. M. Hwang, H. L. Hu, and H.C. Liu, "Fabrication andanalysis of a magnetic self-power microgenerator, " J. Magn. Magn.Mater., vol. 304, no. 1, pp. e394-e396, 2006. (Pubitemid 43783045)
56. C. Serre, A. Pérez-Rodríguez, N. Fondevilla, J. R. Morante, J. Montserrat, and J. Esteve, "Vibrational energy scavenging with Sitechnology electromagnetic inertial microgenerators, " Microsyst. Technol., vol. 13, nos. 11-12, pp. 1655-1661, 2007. (Pubitemid 46855259)
57. S. Kulkarni, E. Koukharenko, R. Torah, J. Tudor, S. Beeby, T. O'Donnell, and S. Roy, "Design, fabrication and test of integratedmicro-scale vibration-based electromagnetic generator, " Sens. ActuatorsA, Phys., vols. 145-146, nos. 1-2, pp. 336-342, 2008.
58. C. Serre, A. Pérez-Rodríguez, N. Fondevilla, E. Martincic, S. Martínez, J. R. Morante, J. Montserrat, and J. Esteve, "Design and implementationof mechanical resonators for optimized inertial electromagneticmicrogenerators, " Microsyst. Technol., vol. 14, nos. 4-5, pp. 653-658, 2008.
59. N. Wang and D. P. Arnold, "Fully batch-fabricated MEMS magneticvibration energy harvesters, " in Proc. PowerMEMS, 2009, pp. 348-351.
60. I. Sari, T. Balkan, and H. Kulah, "An electromagnetic micro powergenerator for low-frequency environmental vibrations based on thefrequency upconversion technique, " J. Microelectromech. Syst., vol. 19, no. 1, pp. 14-27, Feb. 2010.
61. C. Cepnik and U. Wallrabe, "A flat high performance micro energyharvester based on a serpentine coil with a single winding, " in Proc.IEEE 16th Int. Solid-State Sensors, Actuat. Microsyst. Conf., Jun. 2011, pp. 661-664.
62. Y. Jiang, S. Masaoka, T. Fujita, M. Uehara, T. Toyonaga, K. Fujii, K. Higuchi, and K. Maenaka, "Fabrication of a vibration-drivenelectromagnetic energy harvester with integrated NdFeB/Ta multilayeredmicro-magnets, " J. Micromech. Microeng., vol. 21, no. 9, pp. 095014-1-095014-6, 2011.
63. Q. Zhang, S. J. Chen, L. Baumgartel, A. Lin, and E. S. Kim, "Microelectromagneticenergy harvester with integrated magnets, " in Proc.IEEE 16th Int. Solid-State Sensors, Actuat. Microsyst. Conf., Jun. 2011, pp. 1657-1660.