Fabrication and characterization of a wideband MEMS energy harvester utilizing nonlinear springs

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Nguyen, D S ^a   Halvorsen, E ^a   Jensen, G U ^b   Vogl, A ^b  

^a UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

^b SINTEF ICT   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

BAND-BROADENING; ELECTROSTATIC ENERGIES; ENERGY HARVESTER; LINEAR ENERGY; LINEAR VIBRATIONS; NARROW BANDS; NONLINEAR SPRINGS; OUTPUT POWER; RANDOM NOISE; RANDOM VIBRATIONS; SOFTENING SPRINGS; VIBRATION ENERGIES; WIDE-BAND;

BANDWIDTH; HARVESTERS; NUMERICAL ANALYSIS;

ENERGY HARVESTING;

EID: 78649759318     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125009     Document Type: Article

References (34)

1. Mitcheson P D, Yeatman E M, Rao G K, Holmes A S and Green T C 2008 Energy harvesting from human and machine motion for wireless electronic devices Proc. IEEE 96 1457-86
2. Williams C B and Yates R B 1996 Analysis of a micro-electric generator for microsystems Sensors Actuators A 52 8-11
3. Beeby S P, Tudor M J and White N M 2006 Energy harvesting vibration sources for microsystems applications Meas. Sci. Technol. 17 R175-R95
4. von Buren T, Mitcheson P D, Green T C, Yeatman E M, Holmes A S and Tröster G 2006 Optimization of inertial micropower generators for human walking motion IEEE Sensors J. 6 28-38
5. Löhndorf M, Kvisterøy T, Westby E and Halvorsen E 2007 Evaluation of energy harvesting concepts for tire pressure monitoring systems PowerMEMS 2007 Technical Digest (Freiburg, Germany, 28-29 November 2007) pp 331-4
6. Roundy S, Wright P K and Rabaey J 2003 A study of low level vibrations as a power source for wireless sensor nodes Comput. Commun. 26 1131-44
7. Zhu D, Tudor M J and Beeby S P 2010 Strategies for increasing the operating frequency range of vibration energy harvesters: a review Meas. Sci. Technol. 21 022001
8. Gieras J F, Oh J-H, Huzmezan M and Sane H S 2007 Electromechanical energy harvesting system US Patent Application Publication US 2009/0079200 A1
9. Wu X, Lin J, Kato S, Zhang K, Ren T and Liu L 2008 A frequency adjustable vibration energy harvester Proc. PowerMEMS 2008 + microEMS2008 (Sendai, Japan, 9-12 November 2008) pp 245-8
10. Leland E S and Wright P K 2006 Resonance tuning of piezoelectric vibration energy scavenging generators using compressive axial preload Smart Mater. Struct. 15 1413
11. Hu H, Xue H and Hu Y 2007 A spiral-shaped harvester with an improved harvesting element and an adaptive storage circuit IEEE Trans. Ultrason., Ferroelectr. Freq. Control 54 1177-87
12. Piazza G, Abdolvand R, Ho G K and Ayazi F 2004 Voltage-tunable piezoelectrically transduced single-crystal silicon micromechanical resonators Sensors Actuators A 111 71
13. Scheibner D, Mehner J, Reuter D, Kotarsky U, Gessner T and Dötzel W 2005 A spectral vibration detection system based on tunable micromechanical resonators Sensors Actuators A 123-124 63-72
14. Lee K B, Lin L and Cho Y H 2008 A closed-form approach for frequency tunable comb resonators with curved finger contour Sensors Actuators A 141 523
15. Sari I, Balkan T and Kulah H 2008 An electromagnetic micro power generator for wideband environmental vibrations Sensors Actuators A 145-146 405
16. Shahruz S M 2006 Design of mechanical band-pass filters for energy scavenging J. Sound Vib. 292 987
17. Petropoulos T, Yeatman E M and Mitcheson P D 2004 MEMS coupled resonators for power generation and sensing Micromechanics Europe (Leuven, Belgium, 5-7 September 2004) pp 261-4
18. Soliman M, Abdel-Rahman E M, El-Saadany E F and Mansour R R 2009 A design procedure for wideband micropower generators J. Microelectromech. Syst. 18 1288-99
19. Ramlan R, Brennan M J, Mace B R and Kovacic I 2009 Potential benefits of a non-linear stiffness in an energy harvesting device Nonlinear Dyn. 59 545-58
20. Cottone F, Vocca H and Gammaitoni L 2009 Nonlinear energy harvesting Phys. Rev. Lett. 102 080601
21. Mann B P and Sims N D 2010 On the performance and resonant frequency of electromagnetic induction energy harvesters J. Sound Vib. 329 1348-61
22. Stanton S C, McGehee C C and Mann B P 2010 Nonlinear dynamics for broadband energy harvesting: investigation of a bistable piezoelectric inertial generator Physica D: Nonlinear Phenomena 239 640-53
23. Burrow S G, Clare L R, Carrella A and Barton D 2008 Vibration energy harvesters with non-linear compliance Proc. SPIE 6928 692807-10
24. Marinkovic B and Koser H 2009 Smart Sand-a wide bandwidth vibration energy harvesting platform Appl. Phys. Lett. 94 103505
25. Marzencki M, Defosseux M and Basrour S 2010 MEMS vibration energy harvesting devices with passive resonance frequency adaptation capability J. Microelectromech. Syst. 18 1444-53
26. Ramlan R 2009 Effects of non-linear stiffness on performance of an energy harvester device PhD Thesis University of Southampton
27. Tvedt L G W, Nguyen D S and Halvorsen E 2010 Nonlinear behavior of an electrostatic energy harvester under wideand narrowband excitation J. Microelectromech. Syst. 19 305-16
28. Nguyen D S and Halvorsen E 2009 Wideband energy harvesting utilizing nonlinear springs Proc. PowerMEMS 2009 (Washington DC, USA, 1-4 December 2009) pp 411-4
29. Hoffmann D, Folkmer B and Manoli Y 2009 Fabrication, characterization and modelling of electrostatic micro-generators J. Micromech. Microeng. 19 094001 (11pp)
30. Sterken T, Altena G, Fiorini P and Puers R 2007 Characterisation of an electrostatic vibration harvester DTIP 2007 (Stresa, Italy, 25-27 April 2007) pp 297-300
31. Meninger S, Mur-Miranda J O, Amirtharajah R, Chandrakasan A and Lang J H 2001 Vibration-to-electric energy conversion IEEE Trans. Very Large Scale Integr. (VLSI) Syst. 9 64-76
32. Halvorsen E 2008 Energy harvesters driven by broadband random vibrations J. Microelectromech. Syst. 17 1061
33. Miki D, Honzumi M, Suzuki Y and Kasagi N 2010 Large-amplitude MEMS electret generator with nonlinear spring IEEE 23rd Int. Conf. on Micro Electro Mechanical Systems-MEMS 2010 (Hong Kong, China, 24-28 January 2010) pp 176-9
34. Jutte C V and Kota S 2008 Design of nonlinear springs for prescribed load-displacement functions J. Mech. Des. 130 081403