Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 336-342

  Kulkarni, Santosh ^a   Koukharenko, Elena ^b   Torah, Russell ^b   Tudor, John ^b   Beeby, Steve ^b   O'Donnell, Terence ^a   Roy, Saibal ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Energy harvesting from vibrations; MEMS fabrication techniques; Micro fabricated electromagnetic power generator; Testing of power generator

Indexed keywords

COMPOSITE MICROMECHANICS; COPPER; COPPER PLATING; MAGNETIC MATERIALS; MAGNETISM; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SILICON; STANDARDS;

(O-SEC.-BUTYLDITHIOCARBONATIO-S ,S') COPPER; DEEP REACTIVE ION ETCHED (DRIE); ELECTRODEPOSITED COPPER; ELECTROMAGNETIC (EM); IN BETWEEN; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); MICRO SCALES; MICRO-GENERATORS; ND FE B MAGNETS; POWER GENERATORS; POWER OUTPUTS; PROCESSING TECHNIQUES; RESONANT FREQUENCIES; SILICON BEAMS;

ARCHITECTURAL DESIGN;

EID: 44849116969     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.014     Document Type: Article

References (12)

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