Fabrication of a vibration-driven electromagnetic energy harvester with integrated NdFeB/Ta multilayered micro-magnets

Journal of Micromechanics and Microengineering

Volumn 21, Issue 9, 2011, Pages

  Jiang, Yonggang ^a,b   Masaoka, Shingo ^c   Fujita, Takayuki ^b,c   Uehara, Minoru ^d   Toyonaga, Tomohiko ^c   Fujii, Kouhei ^c   Higuchi, Kohei ^b   Maenaka, Kazusuke ^b,c  

^a BEIHANG UNIVERSITY   (China)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

^d HITACHI CABLE LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT VIBRATIONS; DEEP REACTIVE ION ETCHING; ELECTROPLATING PROCESS; ENERGY HARVESTER; HIGH ASPECT RATIO; LARGE VIBRATIONS; MICRO-SPRINGS; MICROCOILS; MOLDING TECHNIQUES; MULTI-LAYERED; OUTPUT VOLTAGES; POWER DENSITIES; SCAVENGING ENERGY; SPUTTERING DEPOSITION; VOLTAGE OUTPUT;

ASPECT RATIO; ELECTROMAGNETIC WAVES; ELECTROMAGNETISM; FABRICATION; HARVESTERS; MAGNETS; REACTIVE ION ETCHING; STATORS; VIBRATORS;

ENERGY HARVESTING;

EID: 80052195475     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/9/095014     Document Type: Article

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