An electromagnetic micro power generator for low-frequency environmental vibrations based on the frequency upconversion technique

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 14-27

  Sari, Ibrahim ^a,b   Balkan, Tuna ^a   Külah, Haluk ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Array of cantilevers; Energy harvesting; Energy scavenging; Frequency upconversion (FupC); Micro power generator

Indexed keywords

ARRAY OF CANTILEVERS; ELECTRICAL POWER GENERATORS; ELECTROMAGNETIC VIBRATIONS; ENERGY SCAVENGING; ENVIRONMENTAL VIBRATIONS; EXCITATION FREQUENCY; EXTERNAL VIBRATIONS; FREQUENCY UP-CONVERSION; HIGHER FREQUENCIES; INPUT VIBRATIONS; LOW FREQUENCY; MICRO POWER GENERATOR; MICROELECTROMECHANICAL SYSTEMS; PROOF OF CONCEPT; VOLTAGE LEVELS;

ELECTRIC GENERATORS; HARVESTING; NANOCANTILEVERS;

ENERGY HARVESTING;

EID: 76349105928     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2037245     Document Type: Article

References (37)

1. A. D. Joseph, A. Kansal, M. B. Srivastava, J. Randall, T. Buren, G. Troster, T. J. Johnson, W. W. Clark, L. Mateu, and F. Moll, "Energy harvesting projects," Pervasive Comput., vol.4, no.1, pp. 69-71, Jan.-Mar. 2005.
2. S. Roundy, E. S. Leland, J. Baker, E. Carleton, E. Reilly, E. Lai, B. Otis, J. M. Rabaey, P. K. Wright, and V. Sundararajan, "Improving power output for vibration-based energy scavengers," Pervasive Comput., vol.4, no.1, pp. 28-36, Jan.-Mar. 2005.
3. J. A. Paradiso and T. Starner, "Energy scavenging for mobile and wireless electronics," Pervasive Comput., vol.4, no.1, pp. 18-27, Jan.-Mar. 2005.
4. F. Peano and T. Tambosso, "Design and optimization of a MEMS electret-based capacitive energy scavenger," J. Microelectromech. Syst., vol.14, no.3, pp. 429-435, Jun. 2005.
5. S. Roundy, P. K. Wright, and J. Rabaey, "A study of low level vibrations as a power source for wireless sensor nodes," Comput. Commun., vol.26, no.11, pp. 1131-1144, Jul. 1, 2003.
6. M. Mizuno and D. G. Chetwynd, "Investigation of a resonance microgen-erator," J. Micromech. Microeng., vol.13, no.2, pp. 209-216, Mar. 2003.
7. S. Roundy, P. K. Wright, and K. S. J. Pister, "Micro-electrostatic vibration-to-electricity converters," in Proc. ASME IMECE, New Orleans, LA, 2002.
8. A. Nounou and H. F. Ragaie, "A lateral comb-drive structure for energy scavenging," in Proc. ICEEC, 2004, pp. 553-556.
9. P. D. Mitcheson, P. Miao, B. H. Stark, E. M. Yeatman, A. S. Holmes, and T. C. Green, "MEMS electrostatic micropower generator for low frequency operation," Sensors Actuators A, Phys., vol. 115, no. 2/3, pp. 523-529, Sep. 21, 2004.
10. T. Sterken, P. Fiorini, K. Baed, R. Puers, and G. Borghs, "An electret-based electrostatic μ-generator," in Proc. 12th Int. Conf. Solid State Sens., Actuators Microsyst., Boston, MA, 2003, pp. 1291-1294.
11. S. Meninger, J. O. Mur-Miranda, R. Amirtharajah, A. P. Chandrakasan, and J. H. Lang, "Vibration-to-electric energy conversion," IEEE Trans. Very Large Scale Integr.(VLSI) Syst., vol.9, no.1, pp. 64-76, Feb. 2001.
12. S. Roundy, "Energy scavenging for wireless sensor nodes with a focus on vibration to electricity conversion," Ph.D. thesis, Dept. Mech. Eng., Univ. California, Berkeley, CA, 2003.
13. P. Glynne-Jones, S. P. Beeby, and N. M. White, "Towards a piezoelectric vibration-powered microgenerator," Proc. Inst. Elect. Eng.-Sci. Meas. Technol., vol.148, no.2, pp. 68-72, Mar. 2001.
14. G. Poulin, E. Sarraute, and F. Costa, "Generation of electrical energy for portable devices: Comparative study of an electromagnetic and a piezoelectric system," Sensors Actuators A, Phys., vol.116, no.3, pp. 461-471, Oct. 29, 2004.
15. T. Sterken, K. Baert, C. Van Hoof, R. Puers, G. Borghs, and P. Fiorini, "Comparative modeling for vibration scavengers," in Proc. IEEE Sensors, 2004, vol.3, pp. 1249-1252.
16. N. S. Shenck and J. A. Paradiso, "Energy scavenging with shoe-mounted piezoelectrics," IEEE Micro, vol.21, no.3, pp. 30-42, May/Jun. 2001.
17. S. Roundy, B. P. Otis, Y. Chee, J. M. Rabaey, and P. Wright, "A 1.9 GHz transmit beacon using environmentally scavenged energy," in Proc. ISPLED, Seoul, Korea, Aug. 25-27, 2003.
18. P. Glynne-Jones, M. J. Tudor, S. P. Beeby, and N. M. White, "An electromagnetic, vibration-powered generator for intelligent sensor systems," Sensors Actuators A, Phys., vol.110, no.1-3, pp. 344-349, Feb. 1, 2004.
19. H. Külah and K. Najafi, "An electromagnetic micro power generator for low-frequency environmental vibrations," in Proc. 17th IEEE MEMS, pp. 237-240.
20. C. Serre, A. Perez-Rodriguez, N. Fondevilla, E. Martincic, S. Martinez, J. R. Morante, J. Montserrat, and J. Esteve, "Design and implementation of mechanical resonators for optimized inertial electromagnetic micro-generators," Microsyst. Technol.-Micro-Nanosyst.-Inf. Storage Process. Syst., vol.14, no.5, pp. 653-658, Apr. 2008.
21. I. Sari, T. Balkan, and H. Külah, "An electromagnetic micro power generator for low frequency environmental vibrations based on the frequency up-conversion technique," in Proc. 22nd IEEE MEMS, Sorrento, Italy, Jan. 25-29, 2009, pp. 1075-1078.
22. C. B. Williams and R. B. Yates, "Analysis of a micro-electric generator for microsystems," Physica A, vol. 52, no. 1/3, pp. 8-11, Mar.-Apr. 1996.
23. C. B. Williams, R. C. Woods, and R. B. Yates, "Feasibility study of a vibration powered micro-electric generator," in Proc. IEE Colloq. Conf. Power Sources (Digest No. 96/107), May 8, 1996, pp. 7/1-7/3.
24. C. Shearwood and R. B. Yates, "Development of an electromagnetic micro-generator," Electron. Lett., vol.33, no.22, pp. 1883-1884, Oct. 23, 1997.
25. M. El-hami, R. Glynne-Jones, N. M. White, M. Hill, S. Beeby, E. James, A. D. Brown, and J. N. Ross, "Design and fabrication of a new vibration-based electromechanical power generator," Sensors Actuators A, Phys., vol.92, no.1-3, pp. 335-342, Aug. 1, 2001.
26. C. T. Pan and T. T. Wu, "Development of a rotary electromagnetic mi-crogenerator," J. Micromech. Microeng., vol.17, no.1, pp. 120-128, Jan. 2007.
27. T. von Buren, P. D. Mitcheson, T. C. Green, E. M. Yeatman, A. S. Holmes, and G. Troster, "Optimization of inertial micropower generators for human walking motion," IEEE Sens. J., vol.6, no.1, pp. 28-38, Feb. 2006.
28. P. H. Wang, X. H. Dai, D. M. Fang, and X. L. Zhao, "Design, fabrication and performance of a new vibration-based electromagnetic micro power generator," Microelectron. J., vol.38, no.12, pp. 1175-1180, Dec. 2007.
29. M. Duffy and D. Carroll, "Electromagnetic generators for power harvesting," in Proc. 35th IEEE Power Electron. Spec. Conf., 2004, vol.3, pp. 2075-2081.
30. W. J. Li, T. C. H. Ho, G. M. H. Chan, P. H. W. Leong, and H. Y. Wong, "Infrared signal transmission by a laser-micromachined, vibration-induced power generator," in Proc. 43rd IEEE Midwest Symp. Circuits Syst., 2000, vol.1, pp. 236-239.
31. N. N. H. Ching, H. Y. Wong, W. J. Li, P. H. W. Leong, and Z. Y. Wen, "A laser-micromachined multi-modal resonating power transducer for wireless sensing systems," Sensors Actuators A, Phys., vol.97/98, pp. 685-690, Apr. 1, 2002.
32. R. Amirtharajah and A. P. Chandrakasan, "Self-powered signal processing using vibration-based power generation," IEEE J. Solid State Circuits, vol.33, no.5, pp. 687-695, May 1998.
33. I. Sari, T. Balkan, and H. Külah, "A wideband electromagnetic micro power generator for wireless microsystems," in Proc. Transducers, Jun. 2007, vol.1, pp. 275-278.
34. I. Sari, T. Balkan, and H. Külah, "An electromagnetic micro power generator for wideband environmental vibrations," Sens. Actuators A, Phys., vol.145/146, pp. 405-413, 2008, DOI: 10.1016/j.sna.2007.11.021.
35. I. Sari, T. Balkan, and H. Külah, "An energy harvesting MEMS frequency detector," in Proc. 6th IEEE SENSORS, Atlanta, GA, Oct. 28-31, 2007, pp. 1460-1463.
36. I. Sari, "Design, fabrication and implementation of a vibration based MEMS energy scavenger for wireless microsystems," Ph.D. dissertation, Middle East Tech. Univ., Ankara, Turkey, 2008.
37. Product Specifications, Parylene Knowledge, Specialty Coating Syst. Inc., Indianapolis, IN, 2006.