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Microelectronic Engineering

Volumn 120, Issue , 2014, Pages 200-204

Improvement of multilayer graphene quality by current stress during thermal CVD

(3) Razak, Liyana Abdul a Tobino, Daiki a Ueno, Kazuyoshi a

a SHIBAURA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

Agglomeration; Cobalt; CVD; Direct current; Graphene; Joule heating

Indexed keywords

AGGLOMERATION; CHEMICAL VAPOR DEPOSITION; GRAIN GROWTH; GRAPHENE; JOULE HEATING; MULTILAYER FILMS; MULTILAYERS;

CATALYTIC LAYERS; CRYSTALLINITIES; DIRECT CURRENT; FURNACE TEMPERATURES; INTENSITY RATIO; INTERCONNECT APPLICATIONS; MULTILAYER GRAPHENE; SAMPLE TEMPERATURE;

COBALT;

EID: 84899060919 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2013.08.009 Document Type: Article

Times cited : (15)

References (25)

1
- 65549093343
- Interconnect
- International Technology Roadmap for Semiconductors (2009), Interconnect.
- (2009) International Technology Roadmap for Semiconductors

2
- 30844463697
- C.K. Hu, L. Gignac, and R. Rosenberg Microelectron. Reliab. 46 2006 213
- (2006) Microelectron. Reliab. , vol.46 , pp. 213
- Hu, C.K.¹ Gignac, L.² Rosenberg, R.³

3
- 69549118314
- A. Naeemi, and J.D. Meindl IEEE Trans. Electron Devices 56 2009 1822
- (2009) IEEE Trans. Electron Devices , vol.56 , pp. 1822
- Naeemi, A.¹ Meindl, J.D.²

4
- 68349131722
- C. Xu, H. Li, and K. Banerjee IEEE Trans. Electron Devices 56 2009 1567
- (2009) IEEE Trans. Electron Devices , vol.56 , pp. 1567
- Xu, C.¹ Li, H.² Banerjee, K.³

5
- 59949098337
- A.H.C. Neto, F. Guinea, N.M.R. Peres, K.S. Novoselov, and A.K. Geim Rev. Mod. Phys. 81 2009 109
- (2009) Rev. Mod. Phys. , vol.81 , pp. 109
- Neto, A.H.C.¹ Guinea, F.² Peres, N.M.R.³ Novoselov, K.S.⁴ Geim, A.K.⁵

6
- 58149218430
- C.V. Tung, M.J. Allen, Y. Yang, and R.B. Kaner Nat. Nanotechnol. 4 2009 25
- (2009) Nat. Nanotechnol. , vol.4 , pp. 25
- Tung, C.V.¹ Allen, M.J.² Yang, Y.³ Kaner, R.B.⁴

7
- 33744469329
- C. Berger, Z.M. Song, X.B. Li, X.S. Wu, N. Brown, C. Naud, D. Mayou, T. Li, J. Hass, A.N. Marchenkov, E.H. Conrad, P.N. First, and W.A. de Heer Science 312 2006 1191
- (2006) Science , vol.312 , pp. 1191
- Berger, C.¹ Song, Z.M.² Li, X.B.³ Wu, X.S.⁴ Brown, N.⁵ Naud, C.⁶ Mayou, D.⁷ Li, T.⁸ Hass, J.⁹ Marchenkov, A.N.¹⁰ Conrad, E.H.¹¹ First, P.N.¹² De Heer, W.A.¹³

8
- 60749097071
- K.V. Emstev, A. Bostwick, K. Horn, J. Jobst, G.L. Kellogg, L. Ley, J.L. McChesney, T. Ohta, S.A. Reshanov, and J. Rohrl Nat. Mater. 8 2009 203
- (2009) Nat. Mater. , vol.8 , pp. 203
- Emstev, K.V.¹ Bostwick, A.² Horn, K.³ Jobst, J.⁴ Kellogg, G.L.⁵ Ley, L.⁶ McChesney, J.L.⁷ Ohta, T.⁸ Reshanov, S.A.⁹ Rohrl, J.¹⁰

9
- 84862854865
- N. Jain, T. Bansal, C. Durcan, and B. Yu IEEE Electron Device Lett. 33 2012 925
- (2012) IEEE Electron Device Lett. , vol.33 , pp. 925
- Jain, N.¹ Bansal, T.² Durcan, C.³ Yu, B.⁴

10
- 52349090932
- Q.K. Yu, J. Lian, S. Siriponglert, H. Li, Y.P. Chen, and S.S. Pei Appl. Phys. Lett. 93 2008 113103
- (2008) Appl. Phys. Lett. , vol.93 , pp. 113103
- Yu, Q.K.¹ Lian, J.² Siriponglert, S.³ Li, H.⁴ Chen, Y.P.⁵ Pei, S.S.⁶

11
- 60749107706
- A. Reina, X.T. Jia, J. Ho, D. Nezich, H.B. Son, V. Bulovic, M.S. Dresselhaus, and J. Kong Nano Lett. 9 2009 30
- (2009) Nano Lett. , vol.9 , pp. 30
- Reina, A.¹ Jia, X.T.² Ho, J.³ Nezich, D.⁴ Son, H.B.⁵ Bulovic, V.⁶ Dresselhaus, M.S.⁷ Kong, J.⁸

12
- 59649099717
- K.S. Kim, Y. Zhao, H. Jang, S.Y. Lee, J.M. Kim, K.S. Kim, J.H. Ahn, P. Kim, J.Y. Choi, and B.H. Hong Nature 457 2009 706
- (2009) Nature , vol.457 , pp. 706
- Kim, K.S.¹ Zhao, Y.² Jang, H.³ Lee, S.Y.⁴ Kim, J.M.⁵ Kim, K.S.⁶ Ahn, J.H.⁷ Kim, P.⁸ Choi, J.Y.⁹ Hong, B.H.¹⁰

13
- 62449331888
- L.G. De Arco, Y. Zhang, A. Kumar, and C.W. Zhou IEEE T. Nanotechnol. 8 2009 135
- (2009) IEEE T. Nanotechnol. , vol.8 , pp. 135
- De Arco, L.G.¹ Zhang, Y.² Kumar, A.³ Zhou, C.W.⁴

14
- 66749119012
- X.S. Li, W.W. Cai, J.H. An, S. Kim, J. Nah, D.X. Yang, R. Piner, A. Velamakanni, I. Jung, and E. Tutuc Science 324 2009 1312
- (2009) Science , vol.324 , pp. 1312
- Li, X.S.¹ Cai, W.W.² An, J.H.³ Kim, S.⁴ Nah, J.⁵ Yang, D.X.⁶ Piner, R.⁷ Velamakanni, A.⁸ Jung, I.⁹ Tutuc, E.¹⁰

15
- 71949096648
- X.S. Li Nano Lett. 9 2009 4268
- (2009) Nano Lett. , vol.9 , pp. 4268
- Li, X.S.¹

16
- 71949123986
- M.P. Levendorf, C.S. Ruiz-Vargas, S. Garg, and J. Park Nano Lett. 9 2009 4479
- (2009) Nano Lett. , vol.9 , pp. 4479
- Levendorf, M.P.¹ Ruiz-Vargas, C.S.² Garg, S.³ Park, J.⁴

17
- 84899062923
- Y. Lee, S. Bae, H. Jang, S. Jang, S. Zhu, S.H. Sim, Y. Song, B.H. Hong, and J. Ahn Nano Lett. 10 2010 025102
- (2010) Nano Lett. , vol.10 , pp. 025102
- Lee, Y.¹ Bae, S.² Jang, H.³ Jang, S.⁴ Zhu, S.⁵ Sim, S.H.⁶ Song, Y.⁷ Hong, B.H.⁸ Ahn, J.⁹

18
- 84861503496
- L. Razak, T. Yamaguchi, S. Akahori, H. Hashimoto, and K. Ueno Jpn. J. Appl. Phys. 51 2012 05EA04
- (2012) Jpn. J. Appl. Phys. , vol.51
- Razak, L.¹ Yamaguchi, T.² Akahori, S.³ Hashimoto, H.⁴ Ueno, K.⁵

19
- 78149395633
- J.M. Lee, H.Y. Jeong, and W.I. Park J. Electron. Mater. 39 2010 2190
- (2010) J. Electron. Mater. , vol.39 , pp. 2190
- Lee, J.M.¹ Jeong, H.Y.² Park, W.I.³

20
- 79957449158
- T. Tanaka, T. Sato, Y. Karasawa, and K. Ueno Jpn. J. Appl. Phys. 50 2011 05EF02
- (2011) Jpn. J. Appl. Phys. , vol.50
- Tanaka, T.¹ Sato, T.² Karasawa, Y.³ Ueno, K.⁴

21
- 34249889935
- A. Ferrari Solid State Commun. 143 2007 47
- (2007) Solid State Commun. , vol.143 , pp. 47
- Ferrari, A.¹

22
- 80054683969
- M.H. Rummeli, C.G. Rocha, F. Ortmann, I. Ibrahim, H. Sevincli, F. Borrnert, J. Kunnstmann, A. Bachmatiuk, M. Potschke, M. Shiraishi, M. Meyyappan, B. Buchner, S. Roche, and C. Cuniberti Adv. Mater. 23 2011 4471
- (2011) Adv. Mater. , vol.23 , pp. 4471
- Rummeli, M.H.¹ Rocha, C.G.² Ortmann, F.³ Ibrahim, I.⁴ Sevincli, H.⁵ Borrnert, F.⁶ Kunnstmann, J.⁷ Bachmatiuk, A.⁸ Potschke, M.⁹ Shiraishi, M.¹⁰ Meyyappan, M.¹¹ Buchner, B.¹² Roche, S.¹³ Cuniberti, C.¹⁴

23
- 77958467167
- Y. Zhang, L. Gomez, F.N. Ishikawa, A. Madaria, K. Ryu, C. Wang, A. Badmaev, and C. Zhou J. Phys. Chem. Lett. 1 2010 3101
- (2010) J. Phys. Chem. Lett. , vol.1 , pp. 3101
- Zhang, Y.¹ Gomez, L.² Ishikawa, F.N.³ Madaria, A.⁴ Ryu, K.⁵ Wang, C.⁶ Badmaev, A.⁷ Zhou, C.⁸

24
- 77954061054
- S. Saadi, F.A. Pedersen, S. Helveg, J. Sehested, B. Hinnemann, C.C. Appel, and J.K. Norkov J. Phys. Chem. C 114 2010 11221
- (2010) J. Phys. Chem. C , vol.114 , pp. 11221
- Saadi, S.¹ Pedersen, F.A.² Helveg, S.³ Sehested, J.⁴ Hinnemann, B.⁵ Appel, C.C.⁶ Norkov, J.K.⁷

25
- 76749147494
- M. Zheng, K. Takei, B. Hsia, H. Fang, X. Zhang, N. Ferralis, H. Ko, Y.L. Chueh, Y. Zhang, R. Maboudian, and A. Javey Appl. Phys. Lett. 96 2010 063110
- (2010) Appl. Phys. Lett. , vol.96 , pp. 063110
- Zheng, M.¹ Takei, K.² Hsia, B.³ Fang, H.⁴ Zhang, X.⁵ Ferralis, N.⁶ Ko, H.⁷ Chueh, Y.L.⁸ Zhang, Y.⁹ Maboudian, R.¹⁰ Javey, A.¹¹

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