SCOPUS 정보 검색 플랫폼

Volumn 121, Issue , 2014, Pages 64-67

Fabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure method

Author keywords

3D microstructure; Double side exposure; Embedded; Partial exposure; SU 8

Indexed keywords

COATINGS; GLASS; LITHOGRAPHY; MICROSTRUCTURE; SUBSTRATES;

3D MICROSTRUCTURES; DOUBLE-SIDE EXPOSURE; EMBEDDED; PARTIAL EXPOSURE; SU-8;

X RAY LITHOGRAPHY;

EID: 84899018637 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2014.03.022 Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.