Creation of embedded structures in SU-8

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6465, Issue , 2007, Pages

  Dykes, James M ^a   Poon, David K ^a   Wang, Jun ^a   Sameoto, Dan ^a   Tsui, Jimmy T K ^a   Choo, Chinheng ^a   Chapman, Glenn H ^a   Parameswaren, Ash M ^a   Gray, Bonnie L ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

3D micro structures; Embedded channel; MEMS; Micro fluidics; SU 8

Indexed keywords

LIGHT SOURCES; MASKS; MICROFLUIDICS; MICROSTRUCTURE; PHOTORESISTORS; ULTRAVIOLET RADIATION;

3D MICROSTRUCTURES; EMBEDDED CHANNELS; GRAYSCALE PHOTOMASK; MICRO-CHANNEL ENCAPSULATION;

MICROCHANNELS;

EID: 34247550743     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.702876     Document Type: Conference Paper

References (16)

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