Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics

Optics Express

Volumn 22, Issue 6, 2014, Pages 6810-6821

  Tsaturyan, Yeghishe ^a   Barg, Andreas ^a   Simonsen, Anders ^a   Villanueva, Luis Guillermo ^b   Schmid, Silvan ^b   Schliesser, Albert ^a   Polzik, Eugene S ^a  

^a UNIVERSITY OF COPENHAGEN   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; PHONONS; RESONANCE; SILICON NITRIDE; VIBRATIONS (MECHANICAL);

CLAMPING CONDITIONS; DENSITY OF STATE; DIELECTRIC MEMBRANES; MECHANICAL RESONATORS; OPTICAL INTERFEROMETRY; PERIODIC PATTERN; QUANTUM OPTOMECHANICS; STRESSED SILICON;

MEMBRANES;

EID: 84896940893     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.22.006810     Document Type: Article

References (30)

1. S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, "High quality factor resonance at room temperature with nanostrings under high tensile stress," J. Appl. Phys. 99, 124304 (2006).
2. Q. P. Unterreithmeier, T. Faust, and J. P. Kotthaus, "Damping of nanomechanical resonators," Phys. Rev. Lett. 105, 027205 (2010).
3. S. Schmid, K. D. Jensen, K. H. Nielsen, and A. Boisen, "Damping mechanisms in high-Q micro and nanomechanical string resonators," Phys. Rev. B 84, 165307 (2011).
4. B. M. Zwickl, W. E. Shanks, A. M. Jayich, C. Yang, C. Bleszynski Jayich, J. D. Thomson, and J. G. E. Harris, "High quality mechanical and optical properties of commercial silicon nitride membranes," Appl. Phys. Lett. 92, 103125 (2008).
5. D. J. Wilson, C. A. Regal, S. B. Papp, and H. J. Kimble, "Cavity optomechanics with stoichiometric SiN films," Phys. Rev. Lett. 103, 207204 (2009).
6. T. P. Purdy, R. W. Peterson, P.-L. Yu, and C. A. Regal, "Cavity optomechanics with Si3N4 membranes at cryogenic temperatures," New J. Phys. 14, 115021 (2012).
7. S. Chakram, Y. S. Patil, L. Chang, and M. Vengalattore, "Dissipation in ultrahigh quality factor SiN membrane resonators," arXiv:1311.1234 (2013).
8. J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high finesse cavity to a micromechanical membrane," Nature 452, 72-75 (2008).
9. T. P. Purdy, R. W. Peterson, and C. A. Regal, "Observation of radiation pressure shot noise on a macroscopic object," Science 339, 801-804 (2013).
10. T. P. Purdy, P.-L. Yu, R.W. Peterson, N. S. Kampel, and C. A. Regal, "Strong optomechanical squeezing of light," Phys. Rev. X 3, 031012 (2013).
11. M. Karuza, C. Biancofiore, M. Bawaj, C. Molinelli, M. Galassi, R. Natali, P. Tombesi, G. Di Giuseppe, and D. Vitali, "Optomechanically induced transparency in a membrane-in-the-middle setup at room temperature," Phys. Rev. A 88 (2013).
12. T. Bagci, A. Simonsen, S. Schmid, L. G. Villanueva, E. Zeuthen, J. Appel, J. M. Taylor, A. Sørensen, K. Usami, A. Schliesser, and E. S. Polzik, "Optical detection of radio waves through a nanomechanical transducer," arXiv:1307.3467 (2013).
13. R. W. Andrews, R. W. Peterson, T. P. Purdy, K. Cicak, R. W. Simmonds, C. A. Regal, and K. W. Lehnert, "Reversible and efficient conversion between microwave and optical light," arXiv:1310.5276 (2013).
14. K. Hammerer, M. Aspelmeyer, E. Polzik, and P. Zoller, "Establishing Einstein-Poldosky-Rosen channels between nanomechanics and atomic ensembles," Phys. Rev. Lett. 102, 020501 (2009).
15. K. Hammerer, K. Stannigel, C. Genes, P. Zoller, P. Treutlein, S. Camerer, D. Hunger, and T.W. Hansch, "Optical lattices with micromechanical mirrors," Phys. Rev. A 82, 021803 (2010).
16. D. R. Southworth, R. A. Barton, S. S. Verbridge, B. Ilic, A. D. Fefferman, H. G. Craighead, and J. M. Parpia, "Stress and silicon nitride: A crack in the universal dissipation of glasses," Phys. Rev. Lett. 102, 225503 (2009).
17. P.-L. Yu, T. P. Purdy, and C. A. Regal, "Control of material damping in high-Q membrane microresonators," Phys. Rev. Lett. 108, 083603 (2012).
18. T. Faust, J. Rieger, M. J. Seitner, J. P. Kotthaus, and E. M. Weig, "Signatures of two-level defects in the temperature-dependent damping of nanomechanical silicon nitride resonators," arXiv:1310.3671 (2013).
19. V. P. Adiga, B. Ilic, R. A. Barton, I. Wilson-Rae, H. G. Craighead, and J. M. Parpia, "Approaching intrinsic performance in ultra-thin silicon nitride drum resonators," J. Appl. Phys. 112, 064323 (2012).
20. C. Enss and S. Hunklinger, Low Temperature Physics (Springer, 2005), Chap. 9, pp. 283-341.
21. I. Wilson-Rae, "Intrinsic dissipation in nanomechanical resonators due to phonon tunneling," Phys. Rev. B 77, 245418 (2008).
22. A. Jockel, M. T. Rakher, M. Korppi, S. Camerer, D. Hunger, M. Mader, and P. Treutlein, "Spectroscopy of mechanical dissipation in micro-mechanical membranes," Appl. Phys. Lett. 99, 143109 (2011).
23. M. Maldovan and E. L. Thomas, Periodic Materials and Interference Lithography for Photonics, Phononics and Mechanics (Wiley-VCH, 2009), Chap. 7, pp. 183-213.
24. M. Maldovan, "Sound and heat revolutions in phononics," Nature 503, 209-217 (2013).
25. T. P. Mayer Alegre, A. Safavi-Naeini, M. Winger, and O. Painter, "Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap," Opt. Express 19, 5658-5669 (2011).
26. P.-L. Yu, K. Cicak, N. S. Kampel, Y. Tsaturyan, T. P. Purdy, R. W. Simmonds, and C. A. Regal, "A phononic bandgap shield for high-q membrane microresonators," Appl. Phys. Lett. 104, 023510 (2014).
27. A. Khelif, B. Aoubiza, S. Mohammadi, A. Adibi, and V. Laude, "Complete band gaps in two-dimensional phononic crystal slabs," Phys. Rev. E 74, 046610 (2006).
28. N. W. Ashcroft and N. D. Mermin, Solid State Physics, 1st ed. (Cengage Learning, 1976).
29. G. S. May and S. M. Sze, Fundamentals of Semiconductor Fabrication, 1st ed. (John Wiley, 2003).
30. A. H. Safavi-Naeini and O. Painter, "Design of optomechanical cavities and waveguides on a simultaneous bandgap phononic-photonic crystal slab," Opt. Express 18, 14926-14943 (2010).