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Applied Physics Letters

Volumn 104, Issue 2, 2014, Pages

A phononic bandgap shield for high-Q membrane microresonators

(7) Yu, P L a Cicak, K b Kampel, N S a Tsaturyan, Y a,c Purdy, T P a Simmonds, R W b Regal, C A a

a UNIVERSITY OF COLORADO (United States)

b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

c UNIVERSITY OF COPENHAGEN (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC COUPLING; MEMBRANE MODES; MICRO RESONATORS; PHONONIC BANDGAP; PHONONIC CRYSTAL; SILICON NITRIDE MEMBRANE; SUPPORT STRUCTURES;

ENERGY GAP; GROUND SUPPORTS; SILICON NITRIDE;

MEMBRANES;

EID: 84893103530 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4862031 Document Type: Article

Times cited : (109)

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