Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning

Ultrasonics Sonochemistry

Volumn 21, Issue 4, 2014, Pages 1496-1503

  Kang, Bong Kyun ^a   Kim, Min Su ^a   Park, Jin Goo ^a  

^a Hanyang University   (South Korea)

Author keywords

Acoustic bubble growth rate; Acoustic cavitation; Gas dissolved water; Megasonic cleaning; Particle removal; Pattern damage

Indexed keywords

ACOUSTIC FIELDS; ACOUSTIC PROPERTIES; BUBBLES (IN FLUIDS); CAVITATION; CLEANING; DENSITY OF GASES; DIFFUSION; DISSOLUTION; GASES; GROWTH RATE;

ACOUSTIC CAVITATIONS; BUBBLE GROWTH; DISSOLVED WATER; MEGASONIC CLEANING; PARTICLE REMOVAL; PATTERN DAMAGES;

PHASE INTERFACES;

HYDROGEN; WATER;

ACOUSTIC PROCEDURES; ARTICLE; CLEANING; DENSITY; DIFFUSION; FORCE; GAS; GAS DIFFUSION; GROWTH RATE; INTERFACE PRESSURE; LIQUID; MICROBUBBLE; MOLECULAR WEIGHT; PRIORITY JOURNAL; SOUND; SOUND PRESSURE; SURFACE TENSION; THERMAL CONDUCTIVITY; ULTRASOUND; VELOCITY;

EID: 84896488976     PISSN: 13504177     EISSN: 18732828     Source Type: Journal    
DOI: 10.1016/j.ultsonch.2014.01.012     Document Type: Article

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