Ex situ bubble generation, enhancing the particle removal rate for single wafer megasonic cleaning processes

Solid State Phenomena

Volumn 134, Issue , 2008, Pages 201-204

  Holsteyns, Frank ^a   Janssens, Tom ^a   Arnauts, Sophia ^a   Van de Putte, Wouter ^b   Minsier, Vincent ^c   Brunner, Johann ^d   Straka, Joachim ^d   Mertens, Paul W ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

^d Sonosys   (Germany)

Author keywords

Bubble generation; Cavitation; Megasonic; Nozzles

Indexed keywords

EID: 38549112451     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.134.201     Document Type: Conference Paper

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