SCOPUS 정보 검색 플랫폼

Volumn 94, Issue 8, 2009, Pages

Mechanism of particle removal by megasonic waves

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING;

DIRECT VISUALIZATIONS; MEGASONIC; MEGASONIC CLEANINGS; MICRO PARTICLES; MICRO-BUBBLES; PARTICLE REMOVALS; PRESSURE GRADIENT FORCES;

PRESSURE GRADIENT;

EID: 61349155412 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3089820 Document Type: Article

Times cited : (125)

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