Megasonics: A cavitation driven process

Solid State Phenomena

Volumn 103-104, Issue , 2005, Pages 159-162

  Holsteyns, Frank ^a   Lee, Kuntack ^b   Graf, Sabine ^c   Palmans, Roger ^a   Vereecke, Guy ^a   Mertens, Paul W ^a  

^a IMEC   (Belgium)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Lausitz University of Applied Sciences   (Germany)

Author keywords

Bubble; Cavitation; Gas; Megasonic cleaning

Indexed keywords

CAVITATION; GALLIUM; SONOCHEMISTRY;

BUBBLE; BUBBLE SIZE DISTRIBUTIONS; MEGASONIC CLEANING; NON-UNIFORMITIES; PARTICLE REMOVAL; PARTICLE REMOVAL EFFICIENCY; PROCESS CONDITION; SATURATION LEVELS;

CLEANING;

EID: 33745854956     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.103-104.159     Document Type: Conference Paper

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