Development of a chip-based ingroove microplasma source: Design, characterization, and diagnostics

Applied Physics Letters

Volumn 104, Issue 10, 2014, Pages

  Li, Xuemei ^a   Tang, Jie ^b   Meng, Fanying ^a   Yuan, Xin ^a   Yan, Yanyue ^a   Zhao, Zhongjun ^a   Duan, Yixiang ^a  

^a SICHUAN UNIVERSITY   (China)

^b XI AN INSTITUTE OF OPTICS AND PRECISION MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; METAMATERIALS;

DIFFERENT SIZES; ELECTRONIC EXCITATION TEMPERATURE; EMISSION INTENSITY; MICROPLASMA SOURCE; MOLECULAR EMISSIONS; ROTATIONAL TEMPERATURE; VIBRATIONAL TEMPERATURE; VOLTAGE-CURRENT CHARACTERISTICS;

PLASMA DEVICES;

EID: 84896304253     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4867484     Document Type: Article

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