Microfabricated inductively coupled plasma generator

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 309-313

  Hopwood, Jeffrey A ^a,b  

^a Northeastern University   (United States)

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC EXCITATION; EMISSION SPECTROSCOPY; ENERGY DISSIPATION; MICROELECTRODES; MICROMACHINING; PLASMA SOURCES;

ELECTROMAGNETIC INDUCTIONS; MICROPLASMAS; SURFACE MICROMACHINED PLASMA GENERATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034270085     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870056     Document Type: Article

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