DC electrical conductivity study of amorphous carbon nitride films prepared by reactive RF magnetron sputtering

Japanese Journal of Applied Physics

Volumn 53, Issue 2 PART 2, 2014, Pages

  Tamura, Naoyuki ^a   Aono, Masami ^a   Harata, Tomo ^a   Kishimura, Hiroaki ^a   Kitazawa, Nobuaki ^a   Watanabe, Yoshihisa ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84894355737     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.7567/JJAP.53.02BC03     Document Type: Article

References (33)

1. M. Rusop, S. Adhikari, A. M. M. Omer, T. Soga, T. Jimbo, and M. Umeno, Diamond Relat. Mater. 15, 371 (2006).
2. Y. Miyajima, S. J. Henley, and S. R. P. Silva, Thin Solid Films 519, 6374 (2011).
3. S. Kumar, C. Godet, A. Goudovskikh, J. P. Kleider, G. Adamopoulos, and V. Chu, J. Non-Cryst. Solids 338-340, 349 (2004).
4. X. W. Liu, C. H. Tseng, J. H. Lin, L. T. Chao, and H. C. Shih, Surf. Coatings Technol. 135, 184 (2001).
5. M. A. Monclus, D. C. Cameron, R. Barklie, and M. Collins, Surf. Coatings Technol. 116-119, 54 (1999).
6. M. Lejeune, O. Durand-Drouhin, S. Charvet, A. Grosman, C. Ortega, and M. Benlahsen, Thin Solid Films 444, 1 (2003).
7. N. E. Derradji, M. L. Mahdjoubi, H. Belkhir, N. Mumumbila, B. Angleraud, and P. Y. Tessier, Thin Solid Films 482, 258 (2005).
8. L. Valentini, J. M. Kenny, G. Carlotti, M. Guerrieri, G. Signorelli, L. Lozzi, and S. Santucci, Thin Solid Films 389, 315 (2001).
9. D. Papadimitriou, G. Roupakas, C. A. Dimitriadis, and S. Logothetidis, J. Appl. Phys. 92, 870 (2002).
10. T. Iwasaki, M. Aono, S. Nitta, H. Habuchi, T. Itoh, and S. Nonomura, Diamond Relat. Mater. 8, 440 (1999).
11. N. Takada, K. Arai, S. Nitta, and S. Nonomura, Appl. Surf. Sci. 113-114, 274 (1997).
12. M. Aono, T. Goto, N. Tamura, N. Kitazawa, and Y. Watanabe, Diamond Relat. Mater. 20, 1208 (2011).
13. C. Iwasaki, M. Aono, N. Tamura, N. Kitazawa, and Y. Watanabe, Jpn. J. Appl. Phys. 51, 10NE26 (2012).
14. P. Wood, T. Wydeven, and O. Tsuji, Thin Solid Films 258, 151 (1995).
15. W. Zhang, Y. Xia, J. Ju, L. Wang, Z. Fang, and M. Zhang, Solid State Commun. 126, 163 (2003).
16. S. Liu, G. Wang, and Z. Wang, J. Non-Cryst. Solids 353, 2796 (2007).
17. M. A. Monclus, D. C. Cameron, and A. K. M. S. Chowdhurry, Thin Solid Films 341, 94 (1999).
18. G. Lazar, B. Bouchet-Fabre, K. Zellama, M. Clin, D. Ballutaud, and C. Godet, J. Appl. Phys. 104, 073534 (2008).
19. W. C. Lanter, D. C. Ingram, and C. A. DeJoseph, Jr., Diamond Relat. Mater. 15, 259 (2006).
20. J. Schwan, V. Batori, S. Ulrich, H. Ehrhardt, and S. R. P. Silva, J. Appl. Phys. 84, 2071 (1998).
21. N. M. J. Conway, W. I. Milne, and J. Robertson, Diamond Relat. Mater. 7, 477 (1998).
22. S. E. Rodil and S. Muhl, Diamond Relat. Mater. 13, 1521 (2004).
23. D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, Phys. Rev. Lett. 73, 118 (1994).
24. J. Tauc and F. Abeles, Optical Properties of Solid (North-Holland, Amsterdam, 1969) p. 277.
25. C. Godet, Diamond Relat. Mater. 12, 159 (2003).
26. Th. Frauenheim, G. Jungnickel, P. Sitch, M. Kaukonen, F. Weich, J. Widany, and D. Porezag, Diamond Relat. Mater. 7, 348 (1998).
27. C. Casiraghi, A. C. Ferrari, and J. Robertson, Phys. Rev. B 72, 085401 (2005).
28. A. C. Ferrari and J. Robertson, Phys. Rev. B 61, 14095 (2000).
29. J. Robertson, Mater. Sci. Eng. R 37, 129 (2002).
30. A. C. Ferrari, S. E. Rodil, and J. Robertson, Phys. Rev. B 67, 155306 (2003).
31. A. C. Ferrari, B. Kleinsorge, G. Adamopoulos, J. Robertson, W. I. Milne, V. Stolojan, L. M. Brown, A. LiBassi, and B. K. Tanner, J. Non-Cryst. Solids 266-269, 765 (2000).
32. T. Schiros, D. Nordlund, L. Pálová, D. Prezzi, L. Zhao, K. S. Kim, U. Wurstbauer, C. Gutiérrez, D. Delongchamp, C. Jaye, D. Fischer, H. Ogasawara, L. G. M. Pettersson, D. R. Reichman, P. Kim, M. S. Hybertsen, and A. N. Pasupathy, Nano Lett. 12, 4025 (2012).
33. J. Robertson and C. A. Davis, Diamond Relat. Mater. 4, 441 (1995).