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Thin Solid Films

Volumn 389, Issue 1-2, 2001, Pages 315-320

Effect of nitrogen addition on the elastic and structural properties of amorphous carbon thin films

(7) Valentini, L a Kenny, J M a Carlotti, G a Guerrieri, M a Signorelli, G b Lozzi, L b Santucci, S b

a UNIVERSITY OF PERUGIA (Italy)

b UNIVERSITY OF L'AQUILA (Italy)

Author keywords

Brillouin light scattering; Elastic properties; Raman scattering; X ray photoelectron spectroscopy

Indexed keywords

ADDITION REACTIONS; BINARY MIXTURES; BRILLOUIN SCATTERING; CARBON; DEPOSITION; DOPING (ADDITIVES); ELASTICITY; GLOW DISCHARGES; HYDROGENATION; METHANE; NITROGEN; PARTIAL PRESSURE; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES; THIN FILMS;

X RAY REFLECTIVITY;

AMORPHOUS FILMS;

EID: 0035876585 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)00879-3 Document Type: Article

Times cited : (16)

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