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Volumn 15, Issue 2-3, 2006, Pages 259-263
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Amorphous carbon nitride for high temperature capacitor dielectric
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Author keywords
Amorphous; Carbon nitride; Electrical properties; Thermal properties
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Indexed keywords
AMORPHOUS FILMS;
ELECTRIC BREAKDOWN;
ION BEAMS;
THERMAL CONDUCTIVITY;
AMORPHOUS;
HIGH ENERGY DENSITY;
HIGH PULSE POWER CAPACITORS;
CARBON NITRIDE;
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EID: 33644903230
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2005.10.067 Document Type: Article |
Times cited : (9)
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References (17)
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