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Volumn 15, Issue 2-3, 2006, Pages 259-263

Amorphous carbon nitride for high temperature capacitor dielectric

Author keywords

Amorphous; Carbon nitride; Electrical properties; Thermal properties

Indexed keywords

AMORPHOUS FILMS; ELECTRIC BREAKDOWN; ION BEAMS; THERMAL CONDUCTIVITY;

EID: 33644903230     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.067     Document Type: Article
Times cited : (9)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.