Ultra-Precision Surface Machining with Reactive Plasma Jets

Contributions to Plasma Physics

Volumn 54, Issue 2, 2014, Pages 145-154

  Arnold, Th ^a   Bohm G ^a   Paetzelt, H ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Acylinders; Aspheres; Atmospheric plasma jet; Chemical etching; Free form optics; Microwave plasma; Surface machining

Indexed keywords

ERROR CORRECTION; FINITE ELEMENT METHOD; FUSED SILICA; PLASMA JETS; TEMPERATURE DISTRIBUTION;

ACYLINDERS; ASPHERES; ATMOSPHERIC PLASMA JET; ATMOSPHERIC PLASMAS; CHEMICAL ETCHING; FREEFORM OPTICS; JET MACHINING; MICROWAVE PLASMA; REMOVAL FUNCTION; SURFACE MACHINING;

SILICON CARBIDE;

EID: 84893552096     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201310058     Document Type: Article

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