SCOPUS 정보 검색 플랫폼

Vakuum in Forschung und Praxis

Volumn 22, Issue 4, 2010, Pages 10-16

Plasma Jet Machining

(6) Arnold, Thomas a Boehm, Georg b Eichentopf, Inga Maria b Janietz, Manuela b Meister, Johannes b Schindler, Axel b

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PLASMAS; CHEMICAL ETCHING; CURVED SURFACES; HIGH SPATIAL RESOLUTION; MATERIAL REMOVAL RATE; SUB-SURFACES; SUBAPERTURE; SURFACE FIGURING; TECHNOLOGY-BASED;

MACHINING; PLASMA ACCELERATORS; PLASMA DEPOSITION; PLASMA JETS; PLASMAS; SILICON COMPOUNDS;

SURFACES;

EID: 77955834999 PISSN: 0947076X EISSN: 15222454 Source Type: Journal
DOI: 10.1002/vipr.201000423 Document Type: Conference Paper

Times cited : (44)

References (13)

1
- 77955804713
- Wilhelmus A. C. M. Messelink, R. Waeger, T. Wons, M. Meeder, Kurt C. Heiniger, Oliver Faehnle: Proc. SPIE, 5869 (2005) 38-43
- (2005) Proc. SPIE , vol.5869 , pp. 38-43
- Messelink, W.A.C.M.¹ Waeger, R.² Wons, T.³ Meeder, M.⁴ Heiniger, K.C.⁵ Faehnle, O.⁶

2
- 33750061366
- 309-312
- M. Tricard, W.I. Kordonski, A.B. Shorey, C. Evans: CIRP Annals -Manufacturing Technology 55 (2006) 1, 309-312
- (2006) CIRP Annals -Manufacturing Technology , vol.55 , pp. 1
- Tricard, M.¹ Kordonski, W.I.² Shorey, A.B.³ Evans, C.⁴

3
- 1842556549
- A. Schindler, T. Haensel, A. Nickel, H.-J. Thomas, H. Lammert, F. Siewert: Proc. SPIE 5180 (2004) 64-72
- (2004) Proc. SPIE , vol.5180 , pp. 64-72
- Schindler, A.¹ Haensel, T.² Nickel, A.³ Thomas, H.-J.⁴ Lammert, H.⁵ Siewert, F.⁶

4
- 0002197466
- Osaka
- G. Boehm, W. Frank, A. Schindler, A. Nickel, H.-J- Thomas, F. Bigl, M. Weiser: Proc. Of the 9th ICPE, (1999) 231-236, Osaka
- (1999) Proc. of the 9th ICPE , pp. 231-236
- Boehm, G.¹ Frank, W.² Schindler, A.³ Nickel, A.⁴ Thomas, H.-J.⁵ Bigl, F.⁶ Weiser, M.⁷

5
- 85134880987
- OSA Technical Digest, Optical Society of America, Washington DC
- G. Boehm, W. Frank, A. Schindler: in "Optical Fabrication and Testing," OSA Technical Digest, Optical Society of America, Washington DC (2000) 23-24
- (2000) Optical Fabrication and Testing , pp. 23-24
- Boehm, G.¹ Frank, W.² Schindler, A.³

6
- 0035443232
- Th. Arnold, G. Boehm, A. Schindler: J. Vac. Sci. Technol. A 19 (2001)2586
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 2586
- Arnold, Th.¹ Boehm, G.² Schindler, A.³

7
- 0036642132
- H. Takino, N. Shibata, H. Itoh, T. Kobayashi, K. Yamamura, Y. Sano, Y. Mori: Appl. Opt. 41 (2002) 3971
- (2002) Appl. Opt. , vol.41 , pp. 3971
- Takino, H.¹ Shibata, N.² Itoh, H.³ Kobayashi, T.⁴ Yamamura, K.⁵ Sano, Y.⁶ Mori, Y.⁷

8
- 33749625936
- C. Fanara, P. Shore, John R. Nicholls, N. Lyford, P. Sommer, P. Fiske: Proc. SPIE 6273 (2006) 62730A
- (2006) Proc. SPIE , vol.6273
- Fanara, C.¹ Shore, P.² Nicholls, J.R.³ Lyford, N.⁴ Sommer, P.⁵ Fiske, P.⁶

9
- 42149131426
- P. Subrahmanyan, G. Gardopee, Y. Verma, N. Li, T. Yu, T. Kyler, P. Fiske, P. Sommer: Proc. SPIE 6666 (2007) 66660A
- (2007) Proc. SPIE , vol.6666
- Subrahmanyan, P.¹ Gardopee, G.² Verma, Y.³ Li, N.⁴ Yu, T.⁵ Kyler, T.⁶ Fiske, P.⁷ Sommer, P.⁸

10
- 35348995090
- T. Hänsel, F. Frost, A. Nickel, A. Schindler: Vakuum in Forschung und Praxis 19 (2007) 24-30.
- (2007) Vakuum in Forschung und Praxis , vol.19 , pp. 24-30
- Hänsel, T.¹ Frost, F.² Nickel, A.³ Schindler, A.⁴

11
- 37649008923
- A. Erko, M. Idir, T Krist, A.G. Michette (Eds), Springer-Verlag, Heidelberg
- F. Siewert, H. Lammert, T. Zeschke: in Modern Developments in X-Ray and Neutron Optics, A. Erko, M. Idir, T Krist, A.G. Michette (Eds), Springer-Verlag, Heidelberg 2008
- (2008) Modern Developments in X-Ray and Neutron Optics
- Siewert, F.¹ Lammert, H.² Zeschke, T.³

12
- 77954911802
- J. Meister, G. Böhm, I.-M. Eichentopf, T. Arnold: Plasma Process. Polym. 6 (2009) 209-213.
- (2009) Plasma Process. Polym. , vol.6 , pp. 209-213
- Meister, J.¹ Böhm, G.² Eichentopf, I.-M.³ Arnold, T.⁴

13
- 77955801754
- http://sci.esa.int/science-e/www/area/index.cfm?fareaid=26

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.