메뉴 건너뛰기




Volumn 121, Issue , 2014, Pages 407-414

Kinetic monte carlo simulation of electrodeposition using the embedded-atom method

Author keywords

Electrodeposition; Embedded atom method; Kinetic Monte Carlo; Simulation

Indexed keywords

ELECTRODEPOSITION PROCESS; EMBEDDED-ATOM METHOD; EMBEDDED-ATOM METHOD POTENTIALS; KINETIC MONTE CARLO; KINETIC MONTE CARLO METHODS; KINETIC MONTE CARLO SIMULATION; MOLECULAR DYNAMICS SIMULATIONS; SIMULATION;

EID: 84893044323     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2013.12.166     Document Type: Article
Times cited : (29)

References (49)
  • 2
    • 0001275346 scopus 로고    scopus 로고
    • Size effects in the electrical resistivity of polycrystalline nanowires
    • doi:10.1103/PhysRevB.61.14215
    • C. Durkan, and M.E. Welland Size effects in the electrical resistivity of polycrystalline nanowires Phys. Rev. B 61 2000 14215 14218 doi:10.1103/ PhysRevB.61.14215
    • (2000) Phys. Rev. B , vol.61 , pp. 14215-14218
    • Durkan, C.1    Welland, M.E.2
  • 3
    • 0035926879 scopus 로고    scopus 로고
    • Electromigration in Cu interconnects with very different grain structures
    • doi:10.1063/1.1355304
    • C.S. Hau-Riege, and C.V. Thompson Electromigration in Cu interconnects with very different grain structures Appl. Phys. Lett. 78 2001 3451 3453 doi:10.1063/1.1355304
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 3451-3453
    • Hau-Riege, C.S.1    Thompson, C.V.2
  • 4
    • 4244079381 scopus 로고
    • Embedded-atom method: Derivation and application to impurities, surfaces, and other defects in metals
    • doi:10.1103/PhysRevB.29.6443
    • M.S. Daw, and M.I. Baskes Embedded-atom method: Derivation and application to impurities, surfaces, and other defects in metals Phys. Rev. B 29 1984 6443 6453 doi:10.1103/PhysRevB.29.6443
    • (1984) Phys. Rev. B , vol.29 , pp. 6443-6453
    • Daw, M.S.1    Baskes, M.I.2
  • 5
    • 43049117263 scopus 로고
    • The embedded-atom method: A review of theory and applications
    • doi:10.1016/0920-2307(93)90001-U
    • M.S. Daw, S.M. Foiles, and M.I. Baskes The embedded-atom method: a review of theory and applications Mater. Sci. Rep. 9 1993 251 310 doi:10.1016/0920- 2307(93)90001-U
    • (1993) Mater. Sci. Rep. , vol.9 , pp. 251-310
    • Daw, M.S.1    Foiles, S.M.2    Baskes, M.I.3
  • 6
    • 0024304886 scopus 로고
    • Self-diffusion and impurity diffusion of fcc metals using the five-frequency model and the Embedded Atom Method
    • doi:10.1557/JMR.1989.0102
    • J.B. Adams, S.M. Foiles, and W.G. Wolfer Self-diffusion and impurity diffusion of fcc metals using the five-frequency model and the Embedded Atom Method J. Mater. Res. 4 1989 102 112 doi:10.1557/JMR.1989.0102
    • (1989) J. Mater. Res. , vol.4 , pp. 102-112
    • Adams, J.B.1    Foiles, S.M.2    Wolfer, W.G.3
  • 7
    • 0022682586 scopus 로고
    • Calculation of hydrogen dissociation pathways on nickel using the embedded atom method
    • DOI 10.1016/0022-5088(87)90144-5
    • S.M. Foiles, M.I. Baskes, C.F. Melius, and M.S. Daw Calculation of hydrogen dissociation pathways on nickel using the embedded atom method J. Less-Common Met. 130 1987 465 473 doi:10.1016/0022-5088(87)90144-5 (Pubitemid 17564821)
    • (1986) Journal of the less-common metals , vol.130 , pp. 465-473
    • Foiles, S.M.1    Baskes, M.I.2    Melius, C.F.3    Daw, M.S.4
  • 9
    • 33947284419 scopus 로고    scopus 로고
    • The structure of electrodeposits - A computer simulation study
    • DOI 10.1007/s00339-007-3915-y, Special Issue "From Surface Science to Nanoscale Devices"
    • M. Mariscal, E. Leiva, K. Pötting, and W. Schmickler The structure of electrodeposits - a computer simulation study Appl. Phys. A 87 2007 385 389 doi:10.1007/s00339-007-3915-y (Pubitemid 46433470)
    • (2007) Applied Physics A: Materials Science and Processing , vol.87 , Issue.3 , pp. 385-389
    • Mariscal, M.1    Leiva, E.2    Potting, K.3    Schmickler, W.4
  • 10
    • 0031144465 scopus 로고    scopus 로고
    • Hyperdynamics: Accelerated molecular dynamics of infrequent events
    • A.F. Voter Hyperdynamics: Accelerated molecular dynamics of infrequent events Phys. Rev. Lett. 78 1997 3908 3911 doi:10.1103/PhysRevLett.78.3908 (Pubitemid 127655393)
    • (1997) Physical Review Letters , vol.78 , Issue.20 , pp. 3908-3911
    • Voter, A.F.1
  • 11
    • 1442281293 scopus 로고    scopus 로고
    • A method for accelerating the molecular dynamics simulation of infrequent events
    • doi:10.1063/1.473503
    • A.F. Voter A method for accelerating the molecular dynamics simulation of infrequent events J. Chem. Phys. 106 11 1997 4665 4677 doi:10.1063/1.473503
    • (1997) J. Chem. Phys. , vol.106 , Issue.11 , pp. 4665-4677
    • Voter, A.F.1
  • 12
    • 0033688171 scopus 로고    scopus 로고
    • Temperature-accelerated dynamics for simulation of infrequent events
    • doi:10.1063/1.481576
    • M.R. Sorensen, and A.F. Voter Temperature-accelerated dynamics for simulation of infrequent events J. Chem. Phys. 112 2000 9599 9606 doi:10.1063/1.481576
    • (2000) J. Chem. Phys. , vol.112 , pp. 9599-9606
    • Sorensen, M.R.1    Voter, A.F.2
  • 13
    • 0036040917 scopus 로고    scopus 로고
    • Extending the time scale in atomistic simulation of materials
    • DOI 10.1146/annurev.matsci.32.112601.141541
    • A.F. Voter, F. Montalenti, and T.C. Germann Extending the time scale in atomistic simulaton of materials Annu. Rev. Mater. Res 32 1 2002 321 346 (Pubitemid 34992574)
    • (2002) Annual Review of Materials Science , vol.32 , pp. 321-346
    • Voter, A.F.1    Montalenti, F.2    Germann, T.C.3
  • 14
    • 36448998595 scopus 로고
    • Theoretical foundations of dynamical monte carlo simulations
    • doi:10.1063/1.461138
    • K.A. Fichthorn, and W.H. Weinberg Theoretical foundations of dynamical monte carlo simulations J. Chem. Phys. 95 1991 1090 1096 doi:10.1063/1.461138
    • (1991) J. Chem. Phys. , vol.95 , pp. 1090-1096
    • Fichthorn, K.A.1    Weinberg, W.H.2
  • 15
    • 0015326437 scopus 로고
    • Simulation of crystal growth with surface diffusion
    • doi:10.1063/1.1661325
    • G.H. Gilmer, and P. Bennema Simulation of crystal growth with surface diffusion J. Appl. Phys. 43 1972 1347 1360 doi:10.1063/1.1661325
    • (1972) J. Appl. Phys. , vol.43 , pp. 1347-1360
    • Gilmer, G.H.1    Bennema, P.2
  • 16
    • 41249084112 scopus 로고    scopus 로고
    • A hybrid multiscale kinetic Monte Carlo method for simulation of copper electrodeposition
    • doi:10.1016/j.jcp.2008.01.056
    • Z. Zheng, R.M. Stephens, R.D. Braatz, R.C. Alkire, and L.R. Petzold A hybrid multiscale kinetic Monte Carlo method for simulation of copper electrodeposition J. Comput. Phys. 227 2008 5184 5199 doi:10.1016/j.jcp.2008.01. 056
    • (2008) J. Comput. Phys. , vol.227 , pp. 5184-5199
    • Zheng, Z.1    Stephens, R.M.2    Braatz, R.D.3    Alkire, R.C.4    Petzold, L.R.5
  • 19
    • 34347324100 scopus 로고    scopus 로고
    • Simulation of kinetically limited nucleation and growth at monatomic step edges
    • DOI 10.1149/1.2746569
    • R.M. Stephens, and R.C. Alkire Simulation of kinetically limited nucleation and growth at monatomic step edges J. Electrochem. Soc. 154 2007 D418 D426 doi:10.1149/1.2746569 (Pubitemid 47014289)
    • (2007) Journal of the Electrochemical Society , vol.154 , Issue.8
    • Stephens, R.M.1    Alkire, R.C.2
  • 20
    • 0033877539 scopus 로고    scopus 로고
    • Kinetic lattice Monte Carlo simulation of facet growth rate
    • DOI 10.1016/S0039-6028(99)01250-9
    • Z. Wang, Y. Li, and J.B. Adams Kinetic lattice Monte Carlo simulation of facet growth rate Surf. Sci. 450 2000 51 63 doi:10.1016/S0039-6028(99)01250-9 (Pubitemid 30572282)
    • (2000) Surface Science , vol.450 , Issue.1 , pp. 51-63
    • Wang, Z.1    Li, Y.2    Adams, J.B.3
  • 21
    • 69949160854 scopus 로고    scopus 로고
    • Kinetic Monte Carlo simulation of kinetically limited copper electrocrystallization on an atomically even surface
    • doi:10.1016/j.electacta.2009.07.019
    • J. Liu, C. Liu, and P.P. Conway Kinetic Monte Carlo simulation of kinetically limited copper electrocrystallization on an atomically even surface Electrochim. Acta 54 2009 6941 6948 doi:10.1016/j.electacta.2009.07.019
    • (2009) Electrochim. Acta , vol.54 , pp. 6941-6948
    • Liu, J.1    Liu, C.2    Conway, P.P.3
  • 22
    • 70350574668 scopus 로고    scopus 로고
    • Kinetic Monte Carlo simulation of electrodeposition of polycrystalline Cu
    • doi:10.1016/j.elecom.2009.09.032
    • J. Liu, C. Liu, and P.P. Conway Kinetic Monte Carlo simulation of electrodeposition of polycrystalline Cu Electrochem. Commun. 11 2009 2207 2211 doi:10.1016/j.elecom.2009.09.032
    • (2009) Electrochem. Commun. , vol.11 , pp. 2207-2211
    • Liu, J.1    Liu, C.2    Conway, P.P.3
  • 23
    • 84875361096 scopus 로고    scopus 로고
    • Kinetic Monte Carlo simulation of the electrodeposition of polycrystalline copper: Effects of substrates and deposition parameters on the microstructure of deposits
    • doi:10.1016/j.electacta.2013.02.112
    • J. Liu, C. Liu, and P.P. Conway Kinetic Monte Carlo simulation of the electrodeposition of polycrystalline copper: Effects of substrates and deposition parameters on the microstructure of deposits Electrochim. Acta 97 2013 132 142 doi:10.1016/j.electacta.2013.02.112
    • (2013) Electrochim. Acta , vol.97 , pp. 132-142
    • Liu, J.1    Liu, C.2    Conway, P.P.3
  • 24
    • 34548409025 scopus 로고    scopus 로고
    • Monte Carlo simulation of damascene electroplating: Effects of additives
    • DOI 10.1080/08927020601067540, PII 769673338
    • Y. Kaneko, Y. Hiwatari, K. Ohara, and F. Asa Monte Carlo simulation of damascene electroplating: effects of additives Mol. Simul. 32 2006 1227 1232 doi:10.1080/08927020601067540 (Pubitemid 47355691)
    • (2006) Molecular Simulation , vol.32 , Issue.15 , pp. 1227-1232
    • Kaneko, Y.1    Hiwatari, Y.2    Ohara, K.3    Asa, F.4
  • 25
    • 64549157702 scopus 로고    scopus 로고
    • Monte Carlo and molecular dynamics studies of the effects of additives in electrodeposition
    • doi:10.3938/jkps.54.1207
    • Y. Kaneko, S. Nishimura, Y. Hiwatari, K. Ohara, and F. Asa Monte Carlo and molecular dynamics studies of the effects of additives in electrodeposition J. Korean Phys. Soc. 54 2009 1207 1211 doi:10.3938/jkps.54.1207
    • (2009) J. Korean Phys. Soc. , vol.54 , pp. 1207-1211
    • Kaneko, Y.1    Nishimura, S.2    Hiwatari, Y.3    Ohara, K.4    Asa, F.5
  • 26
    • 84878011500 scopus 로고    scopus 로고
    • Kinetic Monte Carlo simulation of three-dimensional shape evolution with void formation using solid-by-solid model: Application to via and trench filling
    • doi:10.1016/j.electacta.2013.01.076
    • Y. Kaneko, Y. Hiwatari, K. Ohara, and F. Asa Kinetic Monte Carlo simulation of three-dimensional shape evolution with void formation using solid-by-solid model: Application to via and trench filling Electrochim. Acta 100 2013 321 328 doi:10.1016/j.electacta.2013.01.076
    • (2013) Electrochim. Acta , vol.100 , pp. 321-328
    • Kaneko, Y.1    Hiwatari, Y.2    Ohara, K.3    Asa, F.4
  • 27
    • 0033732880 scopus 로고    scopus 로고
    • Lattice monte carlo models of thin film deposition
    • doi:10.1016/S0040-6090(99)01057-3
    • G.H. Gilmer, H. Huang, T.D. de la Rubia, J.D. Torre, and F. Baumann Lattice monte carlo models of thin film deposition Thin Solid Films 365 2000 189 200 doi:10.1016/S0040-6090(99)01057-3
    • (2000) Thin Solid Films , vol.365 , pp. 189-200
    • Gilmer, G.H.1    Huang, H.2    De La Rubia, T.D.3    Torre, J.D.4    Baumann, F.5
  • 28
    • 0037069464 scopus 로고    scopus 로고
    • Kinetic Monte Carlo study of electrochemical growth in a heteroepitaxial system
    • DOI 10.1021/la020505y
    • M.C. Gimenez, M.G. Del Popolo, and E.P.M. Leiva Kinetic Monte Carlo study of electrochemical growth in a heteroepitaxial system Langmuir 18 2002 9087 9094 doi:10.1021/la020505y (Pubitemid 35361341)
    • (2002) Langmuir , vol.18 , Issue.23 , pp. 9087-9094
    • Gimenez, M.C.1    Del Popolo, M.G.2    Leiva, E.P.M.3
  • 29
    • 0346280144 scopus 로고    scopus 로고
    • Comparative Monte Carlo study of monolayer growth in a heteroepitaxial system in the presence of surface defects
    • doi:10.1021/la035350o
    • M.C. Gimenez, M. Cecilia, and E.P.M. Leiva Comparative Monte Carlo study of monolayer growth in a heteroepitaxial system in the presence of surface defects Langmuir 19 2003 10538 10549 doi:10.1021/la035350o
    • (2003) Langmuir , vol.19 , pp. 10538-10549
    • Gimenez, M.C.1    Cecilia, M.2    Leiva, E.P.M.3
  • 30
    • 17044385406 scopus 로고    scopus 로고
    • Off lattice Monte-Carlo simulations of low-dimensional surface defects and metal deposits on Pt(1 1 1)
    • DOI 10.1016/j.elecom.2005.03.002, PII S1388248105000664
    • O.A. Oviedo, M.I. Rojas, and E.P.M. Leiva Off lattice Monte-Carlo simulations of low-dimensional surface defects and metal deposits on Pt(111) Electrochem. Commun. 7 2005 472 476 doi:10.1016/j.elecom.2005.03.002 (Pubitemid 40497380)
    • (2005) Electrochemistry Communications , vol.7 , Issue.5 , pp. 472-476
    • Oviedo, O.A.1    Rojas, M.I.2    Leiva, E.P.M.3
  • 31
    • 68349144584 scopus 로고    scopus 로고
    • Simulation of kinetically limited growth of electrodeposited polycrystalline Ni films
    • doi:10.1016/j.physe.2009.06.001
    • Y.Y. Huang, Y.C. Zhou, and Y. Pan Simulation of kinetically limited growth of electrodeposited polycrystalline Ni films Physica E 41 2009 1673 1678 doi:10.1016/j.physe.2009.06.001
    • (2009) Physica e , vol.41 , pp. 1673-1678
    • Huang, Y.Y.1    Zhou, Y.C.2    Pan, Y.3
  • 32
    • 33947237274 scopus 로고    scopus 로고
    • An overview of spatial microscopic and accelerated kinetic Monte Carlo methods
    • DOI 10.1007/s10820-006-9042-9
    • A. Chatterjee, and D.G. Vlachos An overview of spatial microscopic and accelerated kinetic Monte Carlo methods J. Comput. Aided Mater. Des. 14 2007 253 308 doi:10.1007/s10820-006-9042-9 (Pubitemid 46433463)
    • (2007) Journal of Computer-Aided Materials Design , vol.14 , Issue.2 , pp. 253-308
    • Chatterjee, A.1    Vlachos, D.G.2
  • 34
    • 34249950625 scopus 로고    scopus 로고
    • Stochastic simulation of chemical kinetics
    • DOI 10.1146/annurev.physchem.58.032806.104637
    • D.T. Gillespie Stochastic simulation of chemical kinetics Annu. Rev. Phys. Chem. 58 2007 35 55 doi:10.1146/annurev.physchem.58.032806.104637 (Pubitemid 46877584)
    • (2007) Annual Review of Physical Chemistry , vol.58 , pp. 35-55
    • Gillespie, D.T.1
  • 35
    • 37049061286 scopus 로고
    • Galvanostatic studies of the kinetics of deposition and dissolution in the copper + copper sulphate system
    • doi:10.1039/TF9595501586
    • E. Mattsson, and J.O. Bockris Galvanostatic studies of the kinetics of deposition and dissolution in the copper + copper sulphate system Trans. Faraday Soc. 55 1959 1586 1601 doi:10.1039/TF9595501586
    • (1959) Trans. Faraday Soc. , vol.55 , pp. 1586-1601
    • Mattsson, E.1    Bockris, J.O.2
  • 36
    • 0000102254 scopus 로고
    • On the calculation of potential energy profile diagrams for processes in electrolytic metal deposition
    • doi:10.1016/0013-4686(61)85009-3
    • B.E. Conway, and J.O. Bockris On the calculation of potential energy profile diagrams for processes in electrolytic metal deposition Electrochim. Acta 3 1961 340 366 doi:10.1016/0013-4686(61)85009-3
    • (1961) Electrochim. Acta , vol.3 , pp. 340-366
    • Conway, B.E.1    Bockris, J.O.2
  • 37
    • 0002160119 scopus 로고
    • Atomic-level geometry of crystalline interfaces
    • D. Wolf, S. Yip, 1st Edition Chapman and Hall Ch. 1
    • D. Wolf Atomic-level geometry of crystalline interfaces D. Wolf, S. Yip, Materials interfaces: Atomic-level structure and properties 1st Edition 1992 Chapman and Hall 1 57 Ch. 1
    • (1992) Materials Interfaces: Atomic-level Structure and Properties , pp. 1-57
    • Wolf, D.1
  • 39
    • 48049091374 scopus 로고    scopus 로고
    • The kinetic Monte Carlo method: Foundation, implementation, and applications
    • doi:10.1016/j.cma.2008.03.010
    • C.C. Battaile The kinetic Monte Carlo method: Foundation, implementation, and applications Comput. Methods Appl. Mech. Engrg 197 41-42 2008 3386 3398 doi:10.1016/j.cma.2008.03.010
    • (2008) Comput. Methods Appl. Mech. Engrg , vol.197 , Issue.4142 , pp. 3386-3398
    • Battaile, C.C.1
  • 41
    • 0001144902 scopus 로고    scopus 로고
    • Efficient exact stochastic simulation of chemical systems with many species and many channels
    • doi:10.1021/jp993732q
    • M.A. Gibson, and J. Bruck Efficient exact stochastic simulation of chemical systems with many species and many channels J. Phys. Chem. A 104 9 2000 1876 1889 doi:10.1021/jp993732q
    • (2000) J. Phys. Chem. A , vol.104 , Issue.9 , pp. 1876-1889
    • Gibson, M.A.1    Bruck, J.2
  • 42
    • 0002467378 scopus 로고
    • Fast parallel algorithms for short-range molecular dynamics
    • doi:10.1006/jcph.1995.1039
    • S. Plimpton Fast parallel algorithms for short-range molecular dynamics J. Comput. Phys. 117 1 1995 1 19 doi:10.1006/jcph.1995.1039
    • (1995) J. Comput. Phys. , vol.117 , Issue.1 , pp. 1-19
    • Plimpton, S.1
  • 43
    • 84871557346 scopus 로고    scopus 로고
    • Kinetic and hydrodynamic implications of 1-D and 2-D models for copper electrodeposition under mixed kinetic-mass transfer control
    • doi:10.1016/j.electacta.2012.11.024
    • J. Vazquez-Arenas, M. Pritzker, and M. Fowler Kinetic and hydrodynamic implications of 1-D and 2-D models for copper electrodeposition under mixed kinetic-mass transfer control Electrochim. Acta 89 2013 717 725 doi:10.1016/j.electacta.2012.11.024
    • (2013) Electrochim. Acta , vol.89 , pp. 717-725
    • Vazquez-Arenas, J.1    Pritzker, M.2    Fowler, M.3
  • 46
    • 65549114450 scopus 로고    scopus 로고
    • Utilizing M inkowski functionals for image analysis: A marching square algorithm
    • doi:10.1088/1742-5468/2008/12/P12015
    • H. Mantz, K. Jacobs, and K. Mecke Utilizing M inkowski functionals for image analysis: a marching square algorithm J. Stat. Mech: Theory Exp. 2008 12 2008 P12015 doi:10.1088/1742-5468/2008/12/P12015
    • (2008) J. Stat. Mech: Theory Exp. , vol.2008 , Issue.12 , pp. 12015
    • Mantz, H.1    Jacobs, K.2    Mecke, K.3
  • 48
    • 0026917582 scopus 로고
    • Growth of Cu on Cu(100)
    • doi:10.1016/0039-6028(92)90641-I
    • H.-J. Ernst, F. Fabre, and J. Lapujoulade Growth of Cu on Cu(100) Surf. Sci. 275 1992 L682 L684 doi:10.1016/0039-6028(92)90641-I
    • (1992) Surf. Sci. , vol.275
    • Ernst, H.-J.1    Fabre, F.2    Lapujoulade, J.3
  • 49
    • 0000790720 scopus 로고
    • Surface vibrations of Ag(100) and Cu(100): A molecular-dynamics study
    • doi:10.1103/PhysRevB.44.13725
    • L. Yang, T.S. Rahman, and M.S. Daw Surface vibrations of Ag(100) and Cu(100): A molecular-dynamics study Phys. Rev. B 44 1991 13725 13733 doi:10.1103/PhysRevB.44.13725
    • (1991) Phys. Rev. B , vol.44 , pp. 13725-13733
    • Yang, L.1    Rahman, T.S.2    Daw, M.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.