Kinetic lattice Monte Carlo simulation of facet growth rate

Surface Science

Volumn 450, Issue 1, 2000, Pages 51-63

  Wang, Zhiyong ^a,b   Li, Youhong ^a,b   Adams, James B ^a,b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; DEPOSITION; DIFFUSION IN SOLIDS; DIMERS; FILM GROWTH; METALLIC FILMS; MONTE CARLO METHODS; NUCLEATION; REACTION KINETICS; THERMAL EFFECTS;

EMBEDDED-ATOM METHOD; KINETIC LATTICE;

COPPER;

EID: 0033877539     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)01250-9     Document Type: Article

References (23)

1. J.M.E. Harper, K.P. Rodbell, J. Vac. Sci. Technol. B 15 (4) (1997) 763.
2. D.P. Tracy, D.B. Knorr, K.P. Rodbell, J. Appl. Phys. 76 (1994) 2671.
3. D.P. Tracy, D.B. Knorr, J. Electron. Mater. 22 (1993) 611.
4. C. Ryu, A.L.S. Loke, T. Nogami, S.S. Wong, in: Proceedings of IEEE International Reliability Physics Symposium (1997), p. 201.
5. T. Ohmi, K. Tsubouchi, Solid State Technol. April (1992) 47.
6. E.M. Zielinski, R.P. Vinci, J.C. Bravman, Mater. Res. Soc. Symp. Proc. 391 (1995) 103.
7. F.M. d'Heurle, I. Ames, Appl. Phys. Lett. 16 (1970) 80.
8. M.K. Gobbert, T. Merchant, L.J. Borucki, T.S. Cale, J. Electrochem. Soc. 1444 (11) (1997) 3945.
9. M.K. Gobbert, C.A. Ringhofer, T.S. Cale, J. Electrochem. Soc. 143 (1996) 2624.
10. T. Smy, K.L. Westra, M.J. Brett, IEEE Trans. Electron. Devices 37 (3) (1990) 591.
11. R.N. Tait, S.K. Dew, T. Smy, M.J. Brett, J. Appl. Phys. 70 (8) (1991) 4295.
12. L.J. Friedrich, S.K. Dew, M.J. Brett, T. Smy, Thin Solid Films 266 (1995) 83.
13. L.J. Friedrich, D.S. Gardner, S.K. Dew, M.J. Brett, T. Smy, Thin Solid Films 266 (1995) 83.
14. M.S. Daw, M.I. Baskes, Phys. Rev. Lett. 50 (1983) 1285.
15. J.B. Adams, S.M. Foiles, W.G. Wolfer, J. Mater. Res. 4 (1989) 102.
16. S.M. Foiles, M.I. Baskes, M.S. Daw, Phys. Rev. B 33 (1986) 7983.
17. G. Boisvert, L.J. Lewis, Phys. Rev. B 56 (1997) 7643.
18. J.B. Adams, Z. Wang, Y. Li, Thin Solid Films (2000), in press.
19. E. Kopatzki, S. Gunther, W. Nichtl-Pecher, R.J. Behm, Surf. Sci. 284 (1993) 154.
20. O. Biham, I. Furman, G. Vidali, R. Kennett, H. Zeng, Surf. Sci. 400 (1998) 29.
21. C. Wild, P. Koidl, W. Müller-Sebert, H. Walcher, R. Kohl, N. Herres, R. Locher, R. Samlenski, R. Brenn, Diamond Relat. Mater. 2 (1993) 158.
22. G.V. Saparin, Diamond Relat. Mater. 3 (1994) 1337.
23. D.J. Srolovitz, D.S. Dandy, J.E. Butler, C.C. Battaile, Paritosh, J. Met. 49 (9) (1997) 42.