메뉴 건너뛰기




Volumn , Issue , 2006, Pages 323-355

Micro energy and chemical systems (MECS) and multiscale fabrication

Author keywords

[No Author keywords available]

Indexed keywords


EID: 84891963611     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/3-540-29339-6_14     Document Type: Chapter
Times cited : (31)

References (61)
  • 4
    • 0022717983 scopus 로고
    • Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation, galvanoforming, and plastic molding (LIGA process
    • Becker EW, Ehrfeld W, Hagmann P, Maner A, Munchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation, galvanoforming, and plastic molding (LIGA process), Microelectronic Engineering 4:35-56
    • (1986) Microelectronic Engineering , vol.4 , pp. 35-56
    • Becker, E.W.1    Ehrfeld, W.2    Hagmann, P.3    Maner, A.4    Munchmeyer, D.5
  • 6
    • 0027557675 scopus 로고
    • Process miniaturisation: A route to total environmental acceptability?
    • Benson RS, Ponton JW (1993) Process miniaturisation: A route to total environmental acceptability?, Trans. IchemE. 71A:160-168
    • (1993) Trans. IchemE , vol.71 A , pp. 160-168
    • Benson, R.S.1    Ponton, J.W.2
  • 9
    • 0024682284 scopus 로고
    • Application of chemical and electrochemical micromachining in the electronics industry
    • Datta M, Romankiw LT (1989) Application of chemical and electrochemical micromachining in the electronics industry, J. Electrochemical Society 136:285-292
    • (1989) J. Electrochemical Society , vol.136 , pp. 285-292
    • Datta, M.1    Romankiw, L.T.2
  • 10
    • 0030652853 scopus 로고    scopus 로고
    • Electrochemical micromachining: An environmentally friendly high speed processing technology
    • Datta M, Harris D (1997) Electrochemical micromachining: An environmentally friendly, high speed processing technology, Electrochimica Acta. 42:3007-3013
    • (1997) Electrochimica Acta , vol.42 , pp. 3007-3013
    • Datta, M.1    Harris, D.2
  • 12
    • 0031382299 scopus 로고    scopus 로고
    • Miniature heat pumps for portable and distributed space conditioning applications
    • Drost MK, Friedrich M (1997) Miniature heat pumps for portable and distributed space conditioning applications, Proc. of IECEC 2:1271-1274
    • (1997) Proc. of IECEC , vol.2 , pp. 1271-1274
    • Drost, M.K.1    Friedrich, M.2
  • 16
    • 0029545690 scopus 로고
    • Rapid fabrication of molds by mechanical micromilling: Process development
    • Friedrich C, Kikkeri B (1995) Rapid fabrication of molds by mechanical micromilling: Process development. Proc. SPIE, vol. 2640, pp 161-171
    • (1995) Proc. SPIE , vol.2640 , pp. 161-171
    • Friedrich, C.1    Kikkeri, B.2
  • 17
    • 84892064786 scopus 로고    scopus 로고
    • Characterisation of metallic foil joints using diffusion bonding and diffusion soldering in microtechnology-based energy and chemical systems
    • Gainesville
    • Gabriel M, Paul BK, Wilson RD, Alman DE (2001) Characterisation of metallic foil joints using diffusion bonding and diffusion soldering in microtechnology-based energy and chemical systems, Transactions of NAMRC XXIX, Gainesville
    • (2001) Transactions of NAMRC XXIX
    • Gabriel, M.1    Paul, B.K.2    Wilson, R.D.3    Alman, D.E.4
  • 22
    • 4043180565 scopus 로고    scopus 로고
    • A nickel aluminide microchannel array heat exchanger for high-Temperature applications
    • Kanlayasiri K, Paul BK (2004) A nickel aluminide microchannel array heat exchanger for high-Temperature applications, J. Mfg Processes 6:17-25
    • (2004) J. Mfg Processes , vol.6 , pp. 17-25
    • Kanlayasiri, K.1    Paul, B.K.2
  • 26
    • 0025574765 scopus 로고
    • Microminiature refrigerators for Joule-Thomson cooling of electronic chips and devices
    • Little WA, (1990) Microminiature refrigerators for Joule-Thomson cooling of electronic chips and devices. Advances in Cryogenic Engineering 35:1325-1333
    • (1990) Advances in Cryogenic Engineering , vol.35 , pp. 1325-1333
    • Little, W.A.1
  • 28
    • 0032648829 scopus 로고    scopus 로고
    • Laser micromachined and laminated microfluidic components for miniaturised thermal, chemical and biological systems
    • Martin PM, Matson DW, Bennett WD, Stewart DC, Lin Y (1999) Laser micromachined and laminated microfluidic components for miniaturised thermal, chemical and biological systems. Proc. of SPIE, vol. 3680, pp 826-833
    • (1999) Proc. of SPIE , vol.3680 , pp. 826-833
    • Martin, P.M.1    Matson, D.W.2    Bennett, W.D.3    Stewart, D.C.4    Lin, Y.5
  • 33
    • 0011443784 scopus 로고    scopus 로고
    • Application of an environmental scanning electron microscope to micromechanical fabrication
    • Paul BK, Klimkiewicz M (1996) Application of an environmental scanning electron microscope to micromechanical fabrication, Scanning 18:490-496
    • (1996) Scanning , vol.18 , pp. 490-496
    • Paul, B.K.1    Klimkiewicz, M.2
  • 34
    • 4043117849 scopus 로고    scopus 로고
    • The effect of shape variation in microlamination on the performance of high-aspect-ratio, metal microchannel arrays
    • Frankfurt
    • Paul, B.K., R.B. Peterson, and W. Wattanutchariya (1999) The effect of shape variation in microlamination on the performance of high-aspect-ratio, metal microchannel arrays, Proc. of the 3rd Int. Conf. on Microreaction Tech., Frankfurt, pp 53-61
    • (1999) Proc. of the 3rd Int. Conf. on Microreaction Tech , pp. 53-61
    • Paul, B.K.1    Peterson, R.B.2    Wattanutchariya, W.3
  • 35
    • 0033297630 scopus 로고    scopus 로고
    • Microlamination for microtechnology-based energy, chemical and biological systems
    • New York
    • Paul B, Peterson R (1999) Microlamination for microtechnology-based energy, chemical and biological systems. Proc. of the ASME, vol. 39, New York
    • (1999) Proc. of the ASME , vol.39
    • Paul, B.1    Peterson, R.2
  • 37
    • 80051668084 scopus 로고    scopus 로고
    • An evaluation of packaging architectures for tissue-based microsystems
    • Hamilton, Canada
    • Paul BK, Aramphongphun C, Chaplen F, Upson R (2003) An evaluation of packaging architectures for tissue-based microsystems, Transactions of NAMRC XXXI, Hamilton, Canada
    • (2003) Transactions of NAMRC , vol.31
    • Paul, B.K.1    Aramphongphun, C.2    Chaplen, F.3    Upson, R.4
  • 38
    • 0346750545 scopus 로고    scopus 로고
    • Thermally-enhanced edge registration (TEER) for aligning metallic microlaminated devices
    • Paul BK, Thomas J (2003) Thermally-enhanced edge registration (TEER) for aligning metallic microlaminated devices, J. Mfg Processes 5:185-193
    • (2003) J. Mfg Processes , vol.5 , pp. 185-193
    • Paul, B.K.1    Thomas, J.2
  • 39
    • 0028531460 scopus 로고
    • Frictional flow characteristics of water flowing through rectangular microchannels
    • Peng XF, Peterson GP, Wang BX (1994) Frictional flow characteristics of water flowing through rectangular microchannels, Experimental Heat Transfer 7:249-264
    • (1994) Experimental Heat Transfer , vol.7 , pp. 249-264
    • Peng, X.F.1    Peterson, G.P.2    Wang, B.X.3
  • 40
    • 0033239195 scopus 로고    scopus 로고
    • Numerical modeling of conduction effects in microscale counter flow heat exchangers
    • Peterson RB (1999) Numerical modeling of conduction effects in microscale counter flow heat exchangers, Microscale Thermophysical Engineering 3:17-30
    • (1999) Microscale Thermophysical Engineering , vol.3 , pp. 17-30
    • Peterson, R.B.1
  • 43
    • 0025699042 scopus 로고
    • Liquid transport on micron and submicron channels
    • Pfahler J, Harley J, Bau H, (1990) Liquid transport on micron and submicron channels, sensors and Actuators A 23:431-434
    • (1990) Sensors and Actuators A , vol.23 , pp. 431-434
    • Pfahler, J.1    Harley, J.2    Bau, H.3
  • 45
    • 0027841770 scopus 로고
    • Experimental measurements of fluid flow and heat transfer in microchannel cooling passages in a chip substrate
    • Rahman MM, Gui F (1993) Experimental measurements of fluid flow and heat transfer in microchannel cooling passages in a chip substrate, Advances in Electronic Packaging 4:685-692
    • (1993) Advances in Electronic Packaging , vol.4 , pp. 685-692
    • Rahman, M.M.1    Gui, F.2
  • 46
    • 84892104320 scopus 로고    scopus 로고
    • Understanding cost drivers in microlamination approaches to microsystem development
    • Portland, Oregon
    • Sharma N, Porter JD, Paul BK (2003) Understanding cost drivers in microlamination approaches to microsystem development. IIE IERC, Portland, Oregon
    • (2003) IIE IERC
    • Sharma, N.1    Porter, J.D.2    Paul, B.K.3
  • 47
    • 32844471649 scopus 로고    scopus 로고
    • Thermally-enhanced edge registration (TEER) for aligning metallic microlaminated devices
    • Thomas J, Paul BK (2002) Thermally-enhanced edge registration (TEER) for aligning metallic microlaminated devices, Transactions of NAMRC XXX:663-670
    • (2002) Transactions of NAMRC , vol.30 , pp. 663-670
    • Thomas, J.1    Paul, B.K.2
  • 49
    • 1642350870 scopus 로고    scopus 로고
    • Optical thin film formation by oxygen cluster ion beam assisted depositions
    • Toyoda N, Yamada I (2004) Optical thin film formation by oxygen cluster ion beam assisted depositions, Appl. Surf. Science 226:231-236
    • (2004) Appl. Surf. Science , vol.226 , pp. 231-236
    • Toyoda, N.1    Yamada, I.2
  • 50
    • 2342636455 scopus 로고    scopus 로고
    • Recent developments in micromilling using focused ion beam technology
    • Tseng A, (2004) Recent developments in micromilling using focused ion beam technology, J. Micromech Microengr 14:15-34
    • (2004) J. Micromech Microengr , vol.14 , pp. 15-34
    • Tseng, A.1
  • 51
    • 0033555467 scopus 로고    scopus 로고
    • Microfluidic diffusion-based separation and detection
    • Weigl BH, Yager P (1999) Microfluidic diffusion-based separation and detection, Science 283:346-347
    • (1999) Science , vol.283 , pp. 346-347
    • Weigl, B.H.1    Yager, P.2
  • 53
    • 0033299024 scopus 로고    scopus 로고
    • Mesoscale machines and electronics: There's plenty of room in the Middle
    • New York
    • Warren et al. (1999) Mesoscale machines and electronics: There's plenty of room in the Middle. Proc. of the ASME, vol. 39, New York
    • (1999) Proc. of the ASME , vol.39
    • Warren1
  • 56
    • 1842421977 scopus 로고    scopus 로고
    • Bonding fixture tolerances for high-volume metal microlamination based on fin buckling and laminae misalignment behavior
    • Wattanutchariya W, Paul BK (2004) Bonding fixture tolerances for high-volume metal microlamination based on fin buckling and laminae misalignment behavior, J. Intl Soc Prec. Engr. Nanotechology 28:117-128
    • (2004) J. Intl Soc Prec. Engr. Nanotechology , vol.28 , pp. 117-128
    • Wattanutchariya, W.1    Paul, B.K.2
  • 57
    • 14744300120 scopus 로고    scopus 로고
    • The effect of fixture compliance on thermallyenhanced edge registration in microlamination, accepted in
    • Wattanutchariya W, Paul BK (2004) The effect of fixture compliance on thermallyenhanced edge registration in microlamination, accepted in J. Mfg SE
    • (2004) J. Mfg SE
    • Wattanutchariya, W.1    Paul, B.K.2
  • 59
    • 0038038662 scopus 로고
    • 3th edn McGraw Hill Singapore
    • White FM (1994) Fluid mechanics. 3th edn, McGraw Hill, Singapore
    • (1994) Fluid Mechanics
    • White, F.M.1
  • 60
    • 0020749925 scopus 로고
    • Measurement of friction factors for the flow of gases in very fine channels used for microminiature Joule-Thomson refrigerators
    • Wu P, Little WA (1983) Measurement of friction factors for the flow of gases in very fine channels used for microminiature Joule-Thomson refrigerators, Cryogenics 273-277
    • (1983) Cryogenics , pp. 273-277
    • Wu, P.1    Little, W.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.