Feasibility of micro power supplies for MEMS

Journal of Microelectromechanical Systems

Volumn 6, Issue 4, 1997, Pages 355-362

  Koeneman, Paul B ^a,b,c,d   Busch Vishniac, Ilene J ^a,e,f,g   Wood, Kristin L ^a,d,f,h,i  

^a The University of Texas at Austin   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^d UNIVERSITY OF TEXAS   (United States)

^e MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^f LUCENT TECHNOLOGIES   (United States)

^g ACOUSTICAL SOCIETY OF AMERICA   (United States)

^h Department of Environmental and Radiological Health Sciences   (United States)

ⁱ CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Energy densities; Micro power supplies; Smart hydrodynamic bearings

Indexed keywords

ACTUATORS; ELECTRIC ENERGY STORAGE; ELECTRIC TRANSFORMERS; MICROELECTROMECHANICAL DEVICES; SENSORS;

ENERGY DENSITIES; MICRO POWER SUPPLIES; MICROELECTROMECHANICAL SYSTEMS; SMART HYDRODYNAMIC BEARINGS;

ELECTRIC POWER SUPPLIES TO APPARATUS;

EID: 0031381941     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.650133     Document Type: Article

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