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Volumn 211, Issue , 2014, Pages 106-112

Optical and transport properties of LaTi1-xMx(O,N) 3±δ (x=0; 0.1, M=Nb5+, W6+) thin films prepared by plasma ammonolysis

(6) Maegli, Alexandra E a Sagarna, Leyre a Populoh, Sascha a Penkala, Bartosz a Otal, Eugenio H a Weidenkaff, Anke a

a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY (Switzerland)

Author keywords

Electronic properties; Microwave induced plasma ammonolysis; Thin films; UV Vis transmittance; X ray photoelectron spectroscopy

Indexed keywords

AMMONOLYSIS; ELECTRONIC CONDUCTIVITY; MICROWAVE-INDUCED PLASMAS; NITRIDATION TIME; OXIDATION STATE; OXYNITRIDES; UV-VIS TRANSMITTANCE; VALENCE BAND SPECTRA;

ELECTRONIC PROPERTIES; ENERGY GAP; PHOTOELECTRONS; PLASMA WAVES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM PREPARATION;

EID: 84891871065 PISSN: 00224596 EISSN: 1095726X Source Type: Journal
DOI: 10.1016/j.jssc.2013.12.008 Document Type: Article

Times cited : (14)

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