Perovskite oxynitride LaTiOxNy thin films: Dielectric characterization in low and high frequencies

Thin Solid Films

Volumn 520, Issue 2, 2011, Pages 778-783

  Lu, Y ^a   Ziani, A ^a   Le Paven Thivet, C ^a   Benzerga, R ^a   Le Gendre, L ^a   Fasquelle, D ^b   Kassem, H ^c   Tessier, F ^d   Vigneras, V ^c   Carru, J C ^b   Sharaiha, A ^a  

^a IETR   (France)

^b UNIVERSITÉ DU LITTORAL CÔTE D OPALE   (France)

^c UNIVERSITÉ BORDEAUX 1   (France)

^d INSTITUT DES SCIENCES CHIMIQUES DE RENNES   (France)

Author keywords

Dielectric properties; Oxynitride; Perovskite; Thin film

Indexed keywords

CONDUCTIVE FILMS; DIELECTRIC PROPERTIES; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC FIELDS; LANTHANUM COMPOUNDS; MAGNESIA; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; NITRIDES; PEROVSKITE; PEROVSKITE SOLAR CELLS; SINGLE CRYSTALS; SUBSTRATES;

CRYSTALLINE QUALITY; DIELECTRIC CHARACTERIZATION; DIFFERENT SUBSTRATES; HIGH DIELECTRIC CONSTANTS; LOW AND HIGH FREQUENCIES; OXYNITRIDES; POLYCRYSTALLINE FILM; RADIO FREQUENCY MAGNETRON SPUTTERING;

THIN FILMS;

EID: 80755136542     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.226     Document Type: Conference Paper

References (18)

1. N. Kohara, T. Sawada, M. Kitawa, T. Uenoyama, European Patent 1078998A2 (2001) 28.
2. X.B. Lu, and Z.G. Liu J. Elec. Mater. 30 2001 554
3. C. Le Paven-Thivet, L. Le Gendre, J. Le Castrec, F. Cheviré, F. Tessier, and J. Pinel Prog. Solid State Chem. 35 2007 299
4. D. Kubelka, and L. Munk Z. Techn. Phys. 12 1931 593
5. A. Perrin, M. Guilloux-Viry, C. Le Paven-Thivet, J.C. Jegaden, M. Sergent, and J. Le Lannic Jeol. News 2 1992 26
6. H. Kassem, A. Ziani, V. Vigneras, G. Lunet, C. Le Paven-Thivet, L. Le Gendre, and F. Tessier Proceeding IEEE EuMW - 38th European Microwave Conference 2008 (EuMC 2008), 1-3, 1606, Amsterdam (Pays-Bas) 27-31 october 2008
7. R. Swanepoel J. Phys. E Sci. Instrum. 16 1983 1214
8. C.M. Fang, G.A. de Wijs, E. Orhan, G. de With, R.A. de Groot, H.T. Hintzen, and R. Marchand J. Phys. Chem. Solids 64 2003 281
9. Y.-I. Kim, P.M. Woodward, K.Z. Baba-Kishi, and C.W. Tai Chem. Mater. 16 2004 1267
10. F. Lichtenberg, D. Widmer, J.G. Bednorz, T. Williams, and A. Reller Z. Phys. B Condensed Matter 82 1991 211
11. A. Rousseau, V. Laur, S. Deputier, V. Bouquet, M. Guilloux-Viry, G. Tanne, P. Laurent, F. Huret, and A. Perrin Thin Solid Films 515 2008 4882
12. S. He, Y. Li, X. Liu, B. Tao, D. Li, and Q. Lu Thin Solid Films 478 2005 261
13. C. Fu, C. Yang, H. Chen, L. Hu, and Y. Wang Mater. Lett. 59 2005 330
14. M. Dawber, K.M. Rabe, and J.F. Scott Rev. Mod. Phys. 77 2005 1083
15. Q. Simon, V. Bouquet, W. Peng, J.-M. Le Floch, F. Houdonougbo, S. Députier, S. Weber, A. Dauscher, V. Madrangeas, D. Cros, and M. Guilloux-Viry Thin Solid Films 517 2009 5940
16. J. Wang, T. Zhang, R. Pan, J. Jiang, Z. Ma, and C. Xiang Mater. Chem. Phys. 121 2010 28
17. X.-Y. Zhang, P. Wanga, F. Xua, and C.K. Ong Solid State Electron. 53 2009 993
18. Y.-I. Kim, W. Si, P.M. Woodward, E. Sutter, S. Park, and T. Vogt Chem. Mater. 19 2007 618