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Volumn 75, Issue 12, 2004, Pages 5277-5279

Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; GAS METERS; LIGHT MODULATION; NITRIDES; PLASMA DEVICES; REACTION KINETICS; SEMICONDUCTOR DEVICE STRUCTURES;

EID: 20444451260     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1821623     Document Type: Article
Times cited : (24)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.