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Volumn 75, Issue 12, 2004, Pages 5277-5279
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Microwave-induced plasma reactor based on a domestic microwave oven for bulk solid state chemistry
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPOSITION;
GAS METERS;
LIGHT MODULATION;
NITRIDES;
PLASMA DEVICES;
REACTION KINETICS;
SEMICONDUCTOR DEVICE STRUCTURES;
METAL NITRIDES;
MICROWAVE-INDUCED PLASMA (MIP);
PLASMA REACTOR;
SOLID STATE CHEMISTRY;
MICROWAVE OVENS;
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EID: 20444451260
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1821623 Document Type: Article |
Times cited : (24)
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References (16)
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