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Volumn 30, Issue 5, 2001, Pages 554-557
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Enhanced dielectric properties of Zr-Sn-Ti oxynitride thin films
a
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Author keywords
Amorphous film; Dielectric property; High material; Oxynitride; PLD; Transmittance
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Indexed keywords
AMORPHOUS FILMS;
DENSITOMETERS;
DIELECTRIC LOSSES;
DIELECTRIC MATERIALS;
DIELECTRIC PROPERTIES OF SOLIDS;
DYNAMIC RANDOM ACCESS STORAGE;
ENERGY GAP;
PULSED LASER DEPOSITION;
REFRACTIVE INDEX;
TEMPERATURE;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
ZIRCONIUM TIN TITANATE;
ZIRCONIUM TIN TITANIUM OXYNITRIDE;
ZIRCONIUM COMPOUNDS;
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EID: 0035331367
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-001-0097-9 Document Type: Article |
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Times cited : (9)
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References (10)
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