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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 32, Issue 1, 2014, Pages

Vibration atomic layer deposition for conformal nanoparticle coating

(4) Park, Suk Won a Woo Kim, Jun a Jong Choi, Hyung a Hyung Shim, Joon a

a Korea University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE BLACK; COMPOSITION ANALYSIS; CONFORMAL FILMS; EFFECTIVE DIFFUSION; NANO-SIZE PARTICLES; NANOPARTICLE COATINGS; PARTICLE DIAMETERS; THIN-FILM COATINGS;

ACETYLENE; ATOMIC LAYER DEPOSITION; DIFFUSION COATINGS; LIGHTING;

DEPOSITION;

EID: 84891762581 PISSN: 07342101 EISSN: 15208559 Source Type: Journal
DOI: 10.1116/1.4845735 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.