Three dimensional strain distribution of wrinkled silicon nanomembranes fabricated by rolling-transfer technique

Applied Physics Letters

Volumn 103, Issue 26, 2013, Pages

  Guo, Qinglei ^a   Zhang, Miao ^a   Xue, Zhongying ^a   Ye, Lin ^a   Wang, Gang ^a   Huang, Gaoshan ^b   Mei, Yongfeng ^b   Wang, Xi ^a   Di, Zengfeng ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERIC SUBSTRATES; MICRO-RAMAN MAPPING; NONLINEAR PLATE THEORY; SILICON NANOMEMBRANES; STRAIN DISTRIBUTIONS; SUBSTRATE INTERFACE; THREE-DIMENSIONAL STRAINS; TRANSFER EFFICIENCY;

INTERFACES (MATERIALS); SHEAR FLOW; SILICON; THREE DIMENSIONAL;

NANOSTRUCTURES;

EID: 84891615337     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4857875     Document Type: Article

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