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Volumn 27, Issue 1, 2014, Pages

Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators

(21) Ohya, S a,c Chiaro, B b Megrant, A a,b Neill, C b Barends, R b Chen, Y b Kelly, J b Low, D b Mutus, J b O'Malley, P J J b Roushan, P b Sank, D b Vainsencher, A b Wenner, J b White, T C b Yin, Y b Schultz, B D a Palmstrom C J a Mazin, B A b Cleland, A N b Martinis, John M b more..

a University of California (United States)

b UNIVERSITY OF CALIFORNIA (United States)

c UNIVERSITY OF TOKYO (Japan)

Author keywords

quantum circuit; qubit; resonator; TiN; titanium nitride

Indexed keywords

CONTAMINANT CONCENTRATIONS; INTRINSIC QUALITY FACTORS; QUANTUM CIRCUIT; QUBIT; REACTIVE MAGNETRON SPUTTERING; ROOM TEMPERATURE DEPOSITION; STOICHIOMETRIC COMPOSITIONS; TARGET-SUBSTRATE DISTANCE;

CONTAMINATION; COPLANAR WAVEGUIDES; DEPOSITION; GRAIN BOUNDARIES; IMPURITIES; METALLIC FILMS; OXYGEN; RESONATORS; SUPERCONDUCTING FILMS; SUPERCONDUCTING RESONATORS; SUPERCONDUCTIVITY; TIN;

TITANIUM NITRIDE;

EID: 84891464647 PISSN: 09532048 EISSN: 13616668 Source Type: Journal
DOI: 10.1088/0953-2048/27/1/015009 Document Type: Article

Times cited : (93)

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