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Volumn 100, Issue 26, 2012, Pages

Etch induced microwave losses in titanium nitride superconducting resonators

(7) Sandberg, Martin a Vissers, Michael R a Kline, Jeffrey S a Weides, Martin a,c Gao, Jiansong a Wisbey, David S b Pappas, David P a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b SAINT LOUIS UNIVERSITY (United States)

c KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILLING FACTOR; HIGH MICROWAVE; INTERNAL LOSS; MICROWAVE LOSS; PATTERNING METHODS; REACTIVE ION; REDEPOSITION; SIDE WALLS; SILICON SURFACES;

CHLORINE; COPLANAR WAVEGUIDES; FLUORINE; IONS; PHOTORESISTS; SILICON WAFERS; TITANIUM NITRIDE;

MICROWAVE RESONATORS;

EID: 84863326548 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4729623 Document Type: Article

Times cited : (105)

References (21)

1
- 4544254582
- 10.1038/nature02851
- A. Wallraff, D. I. Schuster, A. Blais, L. Frunzio, J. Majer, S. Kumar, S. M. Girvin, and R. J. Schoelkopf, Nature (London) 431, 0-5 (2004). 10.1038/nature02851
- (2004) Nature (London) , vol.431 , pp. 0-5
- Wallraff, A.¹ Schuster, D.I.² Blais, A.³ Frunzio, L.⁴ Majer, J.⁵ Kumar, S.⁶ Girvin, S.M.⁷ Schoelkopf, R.J.⁸

2
- 77949416012
- 10.1103/PhysRevLett.104.100504
- P. J. Leek, M. Baur, J. M. Fink, R. Bianchetti, L. Steffen, S. Filipp, and A. Wallraff, Phys. Rev. Lett. 104 (10), 6-9 (2010). 10.1103/PhysRevLett.104. 100504
- (2010) Phys. Rev. Lett. , vol.104 , Issue.10 , pp. 6-9
- Leek, P.J.¹ Baur, M.² Fink, J.M.³ Bianchetti, R.⁴ Steffen, L.⁵ Filipp, S.⁶ Wallraff, A.⁷

3
- 77957346518
- 10.1038/nature09416
- L. DiCarlo, M. D. Reed, L. Sun, B. R. Johnson, J. M. Chow, J. M. Gambetta, L. Frunzio, S. M. Girvin, M. H. Devoret, and R. J. Schoelkopf, Nature (London) 467 (7315), 574-578 (2010). 10.1038/nature09416
- (2010) Nature (London) , vol.467 , Issue.7315 , pp. 574-578
- Dicarlo, L.¹ Reed, M.D.² Sun, L.³ Johnson, B.R.⁴ Chow, J.M.⁵ Gambetta, J.M.⁶ Frunzio, L.⁷ Girvin, S.M.⁸ Devoret, M.H.⁹ Schoelkopf, R.J.¹⁰

4
- 79953709105
- 10.1038/nphys1885
- M. Mariantoni, H. Wang, R. C. Bialczak, M. Lenander, E. Lucero, M. Neeley, a. D. OConnell, D. Sank, M. Weides, J. Wenner, T. Yamamoto, Y. Yin, J. Zhao, J. M. Martinis, and A. N. Cleland, Nat. Phys. 7 (4), 287-293 (2011). 10.1038/nphys1885
- (2011) Nat. Phys. , vol.7 , Issue.4 , pp. 287-293
- Mariantoni, M.¹ Wang, H.² Bialczak, R.C.³ Lenander, M.⁴ Lucero, E.⁵ Neeley, M.⁶ Oconnell, A.D.⁷ Sank, D.⁸ Weides, M.⁹ Wenner, J.¹⁰ Yamamoto, T.¹¹ Yin, Y.¹² Zhao, J.¹³ Martinis, J.M.¹⁴ Cleland, A.N.¹⁵

5
- 0242300181
- 10.1038/nature02037
- P. K. Day, H. G. Leduc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, Nature (London) 425, 12-14 (2003). 10.1038/nature02037
- (2003) Nature (London) , vol.425 , pp. 12-14
- Day, P.K.¹ Leduc, H.G.² Mazin, B.A.³ Vayonakis, A.⁴ Zmuidzinas, J.⁵

6
- 77956204678
- 10.1063/1.3467052
- R. Barends, N. Vercruyssen, A. Endo, P. J. de Visser, T. Zijlstra, T. M. Klapwijk, and J. J. a. Baselmans, Appl. Phys. Lett. 97 (3), 033507 (2010). 10.1063/1.3467052
- (2010) Appl. Phys. Lett. , vol.97 , Issue.3 , pp. 033507
- Barends, R.¹ Vercruyssen, N.² Endo, A.³ De Visser, P.J.⁴ Zijlstra, T.⁵ Klapwijk, T.M.⁶

7
- 79953648114
- 10.1063/1.3552890
- J. M. Sage, V. Bolkhovsky, W. D. Oliver, B. Turek, and P. B. Welander, J. Appl. Phys. 109 (6), 063915 (2011). 10.1063/1.3552890
- (2011) J. Appl. Phys. , vol.109 , Issue.6 , pp. 063915
- Sage, J.M.¹ Bolkhovsky, V.² Oliver, W.D.³ Turek, B.⁴ Welander, P.B.⁵

8
- 71949124270
- 10.1063/1.3273372
- H. Wang, M. Hofheinz, J. Wenner, M. Ansmann, R. C. Bialczak, M. Lenander, E. Lucero, M. Neeley, A. D. OConnell, D. Sank, M. Weides, A. N. Cleland, and J. M. Martinis, Appl. Phys. Lett. 95 (23), 233508 (2009). 10.1063/1.3273372
- (2009) Appl. Phys. Lett. , vol.95 , Issue.23 , pp. 233508
- Wang, H.¹ Hofheinz, M.² Wenner, J.³ Ansmann, M.⁴ Bialczak, R.C.⁵ Lenander, M.⁶ Lucero, E.⁷ Neeley, M.⁸ Oconnell, A.D.⁹ Sank, D.¹⁰ Weides, M.¹¹ Cleland, A.N.¹² Martinis, J.M.¹³

9
- 79957929103
- 10.1109/TASC.2010.2090330
- M. S. Khalil, F. C. Wellstood, and K. D. Osborn, IEEE Trans. Appl. Supercond. 21 (3), 879-882 (2011). 10.1109/TASC.2010.2090330
- (2011) IEEE Trans. Appl. Supercond. , vol.21 , Issue.3 , pp. 879-882
- Khalil, M.S.¹ Wellstood, F.C.² Osborn, K.D.³

10
- 42349093553
- 10.1063/1.2906373
- J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, Appl. Phys. Lett. 92 (15), 152505 (2008). 10.1063/1.2906373
- (2008) Appl. Phys. Lett. , vol.92 , Issue.15 , pp. 152505
- Gao, J.¹ Daal, M.² Vayonakis, A.³ Kumar, S.⁴ Zmuidzinas, J.⁵ Sadoulet, B.⁶ Mazin, B.A.⁷ Day, P.K.⁸ Leduc, H.G.⁹

11
- 80053192981
- 10.1063/1.3637047
- J. Wenner, R. Barends, R. C. Bialczak, Y. Chen, J. Kelly, E. Lucero, M. Mariantoni, a. Megrant, P. J. J. OMalley, D. Sank, A. Vainsencher, H. Wang, T. C. White, Y. Yin, J. Zhao, A. N. Cleland, and J. M. Martinis, Appl. Phys. Lett. 99 (11), 113513 (2011). 10.1063/1.3637047
- (2011) Appl. Phys. Lett. , vol.99 , Issue.11 , pp. 113513
- Wenner, J.¹ Barends, R.² Bialczak, R.C.³ Chen, Y.⁴ Kelly, J.⁵ Lucero, E.⁶ Mariantoni, M.⁷ Megrant, A.⁸ Omalley, P.J.J.⁹ Sank, D.¹⁰ Vainsencher, A.¹¹ Wang, H.¹² White, T.C.¹³ Yin, Y.¹⁴ Zhao, J.¹⁵ Cleland, A.N.¹⁶ Martinis, J.M.¹⁷

12
- 77956592014
- 10.1063/1.3480420
- H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, Appl. Phys. Lett. 97 (10), 102509 (2010). 10.1063/1.3480420
- (2010) Appl. Phys. Lett. , vol.97 , Issue.10 , pp. 102509
- Leduc, H.G.¹ Bumble, B.² Day, P.K.³ Eom, B.H.⁴ Gao, J.⁵ Golwala, S.⁶ Mazin, B.A.⁷ McHugh, S.⁸ Merrill, A.⁹ Moore, D.C.¹⁰ Noroozian, O.¹¹ Turner, A.D.¹² Zmuidzinas, J.¹³

13
- 78650373037
- 10.1063/1.3517252
- M. R. Vissers, J. Gao, D. S. Wisbey, D. A. Hite, C. C. Tsuei, A. D. Corcoles, M. Steffen, and D. P. Pappas, Appl. Phys. Lett. 97 (23), 232509 (2010). 10.1063/1.3517252
- (2010) Appl. Phys. Lett. , vol.97 , Issue.23 , pp. 232509
- Vissers, M.R.¹ Gao, J.² Wisbey, D.S.³ Hite, D.A.⁴ Tsuei, C.C.⁵ Corcoles, A.D.⁶ Steffen, M.⁷ Pappas, D.P.⁸

14
- 79957959105
- 10.1109/TASC.2010.2097578
- D. P. Pappas, M. R. Vissers, D. S. Wisbey, J. S. Kline, and J. Gao, IEEE Trans. Appl. Supercond. 3 (3), 871-874 (2011). 10.1109/TASC.2010.2097578
- (2011) IEEE Trans. Appl. Supercond. , vol.3 , Issue.3 , pp. 871-874
- Pappas, D.P.¹ Vissers, M.R.² Wisbey, D.S.³ Kline, J.S.⁴ Gao, J.⁵

15
- 78649287594
- 10.1063/1.3499608
- D. S. Wisbey, J. Gao, M. R. Vissers, F. C. S. da Silva, J. S. Kline, L. Vale, and D. P. Pappas, J. Appl. Phys. 108 (9), 093918 (2010). 10.1063/1.3499608
- (2010) J. Appl. Phys. , vol.108 , Issue.9 , pp. 093918
- Wisbey, D.S.¹ Gao, J.² Vissers, M.R.³ Da Silva, F.C.S.⁴ Kline, J.S.⁵ Vale, L.⁶ Pappas, D.P.⁷

16
- 84863331429
- The physics of superconducting microwave resonators, Ph.D dissertation (California Institute of Technology)
- J. Gao, The physics of superconducting microwave resonators, Ph.D dissertation (California Institute of Technology, 2008).
- (2008)
- Gao, J.¹

17
- 66749105238
- 10.1103/PhysRevB.79.174512
- C. Song, T. Heitmann, M. DeFeo, K. Yu, R. McDermott, M. Neeley, J. Martinis, and B. Plourde, Phys. Rev. B 79 (17), 174512 (2009). 10.1103/PhysRevB.79.174512
- (2009) Phys. Rev. B , vol.79 , Issue.17 , pp. 174512
- Song, C.¹ Heitmann, T.² Defeo, M.³ Yu, K.⁴ McDermott, R.⁵ Neeley, M.⁶ Martinis, J.⁷ Plourde, B.⁸

18
- 84857730466
- 10.1063/1.3683552
- M. R. Vissers, J. S. Kline, J. Gao, D. S. Wisbey, and D. P. Pappas, Appl. Phys. Lett. 100 (8), 082602 (2012). 10.1063/1.3683552
- (2012) Appl. Phys. Lett. , vol.100 , Issue.8 , pp. 082602
- Vissers, M.R.¹ Kline, J.S.² Gao, J.³ Wisbey, D.S.⁴ Pappas, D.P.⁵

19
- 0002622703
- Fabrication and DC characterization of mixers for use between 600 and 1200 GHz
- J. A. Stern, B. Bumble, H. LeDuc, J. W. Kooi, and J. Zmuidzinas, Fabrication and DC characterization of mixers for use between 600 and 1200 GHz., Proceedings of the Ninth lntematioal Symposium on Space Terahertz Technology, p. 305, 1998.
- (1998) Proceedings of the Ninth Lntematioal Symposium on Space Terahertz Technology , pp. 305
- Stern, J.A.¹ Bumble, B.² Leduc, H.³ Kooi, J.W.⁴ Zmuidzinas, J.⁵

20
- 0025536862
- 10.1149/1.2086322
- S. J. Fonash, J. Electrochem. Soc. 137 (12), 3885 (1990). 10.1149/1.2086322
- (1990) J. Electrochem. Soc. , vol.137 , Issue.12 , pp. 3885
- Fonash, S.J.¹

21
- 0026171734
- 10.1109/77.84617
- D. M. Sheen, S. M. Ali, D. E. Oates, R. S. Withers, and J. A. Kong, IEEE Trans. Appl. Supercond. 1 (2), 108-115 (1991). 10.1109/77.84617
- (1991) IEEE Trans. Appl. Supercond. , vol.1 , Issue.2 , pp. 108-115
- Sheen, D.M.¹ Ali, S.M.² Oates, D.E.³ Withers, R.S.⁴ Kong, J.A.⁵

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