Toward sensitive graphene nanoribbon-nanopore devices by preventing electron beam-induced damage

ACS Nano

Volumn 7, Issue 12, 2013, Pages 11283-11289

  Puster, Matthew ^a,b   Rodríguez Manzo, Julio A ^a   Balan, Adrian ^a   Drndić, Marija ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

DNA; graphene nanoribbon; nanopore; sequencing; silicon nitride; STEM; TEM

Indexed keywords

ELECTROLYTE SOLUTIONS; GRAPHENE NANO-RIBBON; GRAPHENE NANORIBBONS (GNRS); HIGH MAGNIFICATIONS; NEXT-GENERATION DNA SEQUENCING; RESISTANCE INCREASE; SEQUENCING; STEM;

DNA; DNA SEQUENCES; ELECTRON BEAMS; GENE ENCODING; GRAPHENE; NANOPORES; SENSORS; SILICON NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

NANORIBBONS;

CARBON NANOTUBE; DNA; ELECTROLYTE; GOLD; GRAPHITE; POLY(METHYL METHACRYLATE); WATER;

ARTICLE; CHEMISTRY; DNA SEQUENCE; ELECTRODE; ELECTRON; EQUIPMENT; FEEDBACK SYSTEM; NANOPORE; NANOTECHNOLOGY; PHOTOCHEMISTRY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

DNA; ELECTRODES; ELECTROLYTES; ELECTRONS; FEEDBACK; GOLD; GRAPHITE; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, ELECTRON, TRANSMISSION; NANOPORES; NANOTECHNOLOGY; NANOTUBES, CARBON; PHOTOCHEMISTRY; POLYMETHYL METHACRYLATE; SEQUENCE ANALYSIS, DNA; WATER;

EID: 84891355557     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn405112m     Document Type: Article

References (34)

1. Yuan, W.; Zhou, Y.; Li, Y.; Li, C.; Peng, H.; Zhang, J.; Liu, Z.; Dai, L.; Shi, G. The Edge- and Basal-Plane-Specific Electrochemistry of a Single-Layer Graphene Sheet Sci. Rep. 2013, 3, 2248
2. Geim, A. K.; Novoselov, K. S. The Rise of Graphene Nat. Mater. 2007, 6, 183-191
3. Schedin, F.; Geim, A. K.; Morozov, S. V.; Hill, E. W.; Blake, P.; Katsnelson, M. I.; Novoselov, K. S. Detection of Individual Gas Molecules Adsorbed on Graphene Nat. Mater. 2007, 6, 652-655
4. Han, M.; Özyilmaz, B.; Zhang, Y.; Kim, P. Energy Band-Gap Engineering of Graphene Nanoribbons Phys. Rev. Lett. 2007, 98, 206805
5. Chen, Z.; Lin, Y.-M.; Rooks, M. J.; Avouris, P. Graphene Nano-Ribbon Electronics Phys. E (Amsterdam, Neth.) 2007, 40, 228-232
6. Özyilmaz, B.; Jarillo-Herrero, P.; Efetov, D.; Kim, P. Electronic Transport in Locally Gated Graphene Nanoconstrictions Appl. Phys. Lett. 2007, 91, 192107
7. Lu, Y.; Goldsmith, B.; Strachan, D. R.; Lim, J. H.; Luo, Z.; Johnson, A. T. C. High-On/Off-Ratio Graphene Nanoconstriction Field-Effect Transistor Small 2010, 6, 2748-2754
8. Fischbein, M. D.; Drndic, M. Sub-10 nm Device Fabrication in a Transmission Electron Microscope Nano Lett. 2007, 7, 1329-1337
9. Fischbein, M. D.; Drndic, M. Electron Beam Nanosculpting of Suspended Graphene Sheets Appl. Phys. Lett. 2008, 93, 113107
10. Lu, Y.; Merchant, C. A.; Drndic, M.; Johnson, A. T. C. In Situ Electronic Characterization of Graphene Nanoconstrictions Fabricated in a Transmission Electron Microscope Nano Lett. 2011, 11, 5184-5188
11. Nelson, T.; Zhang, B.; Prezhdo, O. V. Detection of Nucleic Acids with Graphene Nanopores: Ab Initio Characterization of a Novel Sequencing Device Nano Lett. 2010, 10, 3237-3242
12. Min, S. K.; Kim, W. Y.; Cho, Y.; Kim, K. S. Fast DNA Sequencing with a Graphene-Based Nanochannel Device Nat. Nanotechnol. 2011, 6, 162-165
13. Saha, K. K.; Drndic, M.; Nikolić, B. K. DNA Base-Specific Modulation of Microampere Transverse Edge Currents through a Metallic Graphene Nanoribbon with a Nanopore Nano Lett. 2012, 12, 50-55
14. Avdoshenko, S. M.; Nozaki, D.; Gomes da Rocha, C.; González, J. W.; Lee, M. H.; Gutierrez, R.; Cuniberti, G. Dynamic and Electronic Transport Properties of DNA Translocation through Graphene Nanopores Nano Lett. 2013, 13, 1969-1976
15. Gao, X. P. A.; Zheng, G.; Lieber, C. M. Subthreshold Regime Has the Optimal Sensitivity for Nanowire FET Biosensors Nano Lett. 2010, 10, 547-552
16. Xie, P.; Xiong, Q.; Fang, Y.; Qing, Q.; Lieber, C. M. Local Electrical Potential Detection of DNA by Nanowire-Nanopore Sensors Nat. Nanotechnol. 2011, 7, 119-125
17. Yang, J. K.; Cord, B.; Duan, H.; Berggren, K. K.; Klingfus, J.; Nam, S.-W.; Kim, K.-B.; Rooks, M. J. Understanding of Hydrogen Silsesquioxane Electron Resist for Sub-5-nm-Half-Pitch Lithography J. Vac. Sci. Technol. B 2009, 27, 2622-2627
18. Nam, S.-W.; Rooks, M. J.; Berggren, K. K.; Yang, J. K.; Kim, K.-B.; Lee, M.-H.; Kim, H.-M.; Yoon, D. Y.; Sim, J. H. Contrast Enhancement Behavior of Hydrogen Silsesquioxane in a Salty Developer J. Vac. Sci. Technol. B 2009, 27, 2635-2639
19. Chen, J. H.; Jang, C.; Adam, S.; Fuhrer, M. S.; Williams, E. D.; Ishigami, M. Charged-Impurity Scattering in Graphene Nat. Phys. 2008, 4, 377-381
20. 2 Appl. Phys. Lett. 2011, 99, 122108
21. Lin, Y.-C.; Lu, C.-C.; Yeh, C.-H.; Jin, C.; Suenaga, K.; Chiu, P.-W. Graphene Annealing: How Clean Can It Be? Nano Lett. 2011, 12, 414-419
22. Lo, C. J.; Aref, T.; Bezryadin, A. Fabrication of Symmetric Sub-5 nm Nanopores Using Focused Ion and Electron Beams Nanotechnology 2006, 17, 3264-3267
23. Yang, J.; Ferranti, D. C.; Stern, L. A.; Sanford, C. A.; Huang, J.; Ren, Z.; Qin, L.-C.; Hall, A. R. Rapid and Precise Scanning Helium Ion Microscope Milling of Solid-State Nanopores for Biomolecule Detection Nanotechnology 2011, 22, 285310
24. Venta, K.; Shemer, G.; Puster, M.; Rodríguez-Manzo, J. A.; Balan, A.; Rosenstein, J. K.; Shepard, K.; Drndic, M. Differentiation of Short, Single-Stranded DNA Homopolymers in Solid-State Nanopores ACS Nano 2013, 7, 4629-4636
25. Meyer, J. C.; Eder, F.; Kurasch, S.; Skakalova, V.; Kotakoski, J.; Park, H. J.; Roth, S.; Chuvilin, A.; Eyhusen, S.; Benner, G. et al. Accurate Measurement of Electron Beam Induced Displacement Cross Sections for Single-Layer Graphene Phys. Rev. Lett. 2012, 108, 196102
26. Banhart, F.; Kotakoski, J.; Krasheninnikov, A. V. Structural Defects in Graphene ACS Nano 2011, 5, 26-41
27. Childres, I.; Jauregui, L. A.; Foxe, M.; Tian, J.; Jalilian, R.; Jovanovic, I.; Chen, Y. P. Effect of Electron-Beam Irradiation on Graphene Field Effect Devices Appl. Phys. Lett. 2010, 97, 173109
28. Chen, J.-H.; Cullen, W.; Jang, C.; Fuhrer, M.; Williams, E. Defect Scattering in Graphene Phys. Rev. Lett. 2009, 102, 236805
29. Banhart, F. Irradiation Effects in Carbon Nanostructures Rep. Prog. Phys. 1999, 62, 1181-1221
30. Egerton, R. F.; Li, P.; Malac, M. Radiation Damage in the TEM and SEM Micron 2004, 35, 399-409
31. Williams, D. B.; Carter, C. B. Transmission Electron Microscopy; Springer: Berlin, 2009.
32. Howitt, D. G.; Chen, S. J.; Gierhart, B. C.; Smith, R. L.; Collins, S. D. The Electron Beam Hole Drilling of Silicon Nitride Thin Films J. Appl. Phys. 2008, 103, 024310
33. Kim, H.-M.; Lee, M.-H.; Kim, K.-B. Theoretical and Experimental Study of Nanopore Drilling by a Focused Electron Beam in Transmission Electron Microscopy Nanotechnology 2011, 22, 275303
34. Luo, Z.; Lu, Y.; Singer, D. W.; Berck, M. E.; Somers, L. A.; Goldsmith, B. R.; Johnson, A. T. C. Effect of Substrate Roughness and Feedstock Concentration on Growth of Wafer-Scale Graphene at Atmospheric Pressure Chem. Mater. 2011, 23, 1441-1447