SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2635-2639

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

(9) Nam, Sung Wook a Rooks, Michael J b Yang, Joel K W c Berggren, Karl K c Kim, Hyun Mi a Lee, Min Hyun a Kim, Ki Bum a Sim, Jae Hwan a Yoon, Do Yeung a

a Seoul National University (South Korea)

b Yale University (United States)

c USA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTRAST ENHANCEMENT; DEVELOPMENT PROCESS; DEVELOPMENT RATE; DEVELOPMENT SYSTEMS; DEVELOPMENT TIME; GRATING PATTERNS; HYDROGEN SILSESQUIOXANE; THINNING PROCESS; TIME-RESOLVED ANALYSIS;

ELECTRON BEAM LITHOGRAPHY;

EID: 72849121822 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3245991 Document Type: Conference Paper

Times cited : (30)

References (11)

1
- 72849137630
- in press
- J. K. W. Yang, B. Cord, K. K. Berggren, J. Klingfus, S. W. Nam, K. B. Kim, and M. J. Rooks, J. Vac. Sci. Technol. B 27 (2009) (in press).
- (2009) J. Vac. Sci. Technol. B , vol.27
- Yang, J.K.W.¹ Cord, B.² Berggren, K.K.³ Klingfus, J.⁴ Nam, S.W.⁵ Kim, K.B.⁶ Rooks, M.J.⁷

2
- 0242425719
- W. Henschel, Y. M. Georgiev, and H. Kurz, J. Vac. Sci. Technol. B 21, 2018 (2005).
- (2005) J. Vac. Sci. Technol. B , vol.21 , pp. 2018
- Henschel, W.¹ Georgiev, Y.M.² Kurz, H.³

3
- 37149029101
- M. Haffner, A. Haug, A. Heeren, M. Fleischer, H. Peisert, T. Chasse, and D. P. Kern, J. Vac. Sci. Technol. B 25, 2045 (2007).
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 2045
- Haffner, M.¹ Haug, A.² Heeren, A.³ Fleischer, M.⁴ Peisert, H.⁵ Chasse, T.⁶ Kern, D.P.⁷

4
- 37149004252
- J. K. W. Yang and K. K. Berggren, J. Vac. Sci. Technol. B 25, 2025 (2007).
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 2025
- Yang, J.K.W.¹ Berggren, K.K.²

5
- 0032135966
- M. J. Loboda, C. M. Grove, and R. F. Schneider, J. Electrochem. Soc. 145, 2861 (1998).
- (1998) J. Electrochem. Soc. , vol.145 , pp. 2861
- Loboda, M.J.¹ Grove, C.M.² Schneider, R.F.³

6
- 0002053947
- H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, and K. Kurihara, J. Vac. Sci. Technol. B 16, 69 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 69
- Namatsu, H.¹ Takahashi, Y.² Yamazaki, K.³ Yamaguchi, T.⁴ Nagase, M.⁵ Kurihara, K.⁶

7
- 72849151963
- Marco Island, FL, (unpublished), Paper No. 6B.5
- J. Kim, W. Chao, X. Liang, B. Griedel, D. Hilken, and D. Olynick, 53rd EIPBN Conference, Marco Island, FL, 2009 (unpublished), Paper No. 6B.5.
- (2009) 53rd EIPBN Conference
- Kim, J.¹ Chao, W.² Liang, X.³ Griedel, B.⁴ Hilken, D.⁵ Olynick, D.⁶

8
- 13244259602
- G. M. Schmid, L. E. Carpenter, and J. A. Liddle, J. Vac. Sci. Technol. B 22, 3497 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 3497
- Schmid, G.M.¹ Carpenter, L.E.² Liddle, J.A.³

9
- 59949102778
- H. S. Lee, J. S. Lee, S. W. Nam, H. M. Kim, and K. B. Kim, J. Vac. Sci. Technol. B 27, 188 (2009).
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 188
- Lee, H.S.¹ Lee, J.S.² Nam, S.W.³ Kim, H.M.⁴ Kim, K.B.⁵

10
- 37149055052
- H. S. Lee, B. S. Kim, H. M. Kim, J. S. Wi, S. W. Nam, K. B. Jin, Y. Arai, and K. B. Kim, Adv. Mater. (Weinheim, Ger.) 19, 4189 (2007).
- (2007) Adv. Mater. (Weinheim, Ger.) , vol.19 , pp. 4189
- Lee, H.S.¹ Kim, B.S.² Kim, H.M.³ Wi, J.S.⁴ Nam, S.W.⁵ Jin, K.B.⁶ Arai, Y.⁷ Kim, K.B.⁸

11
- 53349153204
- S. Choi, M. J. Word, V. Kumar, and I. Adesida, J. Vac. Sci. Technol. B 26, 1654 (2008).
- (2008) J. Vac. Sci. Technol. B , vol.26 , pp. 1654
- Choi, S.¹ Word, M.J.² Kumar, V.³ Adesida, I.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.