Consequences of surface neutralization in diblock copolymer thin films

ACS Nano

Volumn 7, Issue 11, 2013, Pages 9905-9919

  Kim, Sangwon ^a   Bates, Christopher M ^b   Thio, Anthony ^c   Cushen, Julia D ^c   Ellison, Christopher J ^c   Willson, C Grant ^a,b,c   Bates, Frank S ^a  

^a University of Minnesota   (United States)

^b University of Texas at Austin   (United States)

^c The University of Texas at Austin   (United States)

Author keywords

0.5 L 0; block copolymer; holes; islands; step height; thickness quantization; thin film interfaces

Indexed keywords

0.5 L 0; HOLES; ISLANDS; STEP HEIGHT; THICKNESS QUANTIZATION; THIN FILM INTERFACES;

ANNEALING; BRUSHES; FILM THICKNESS; OPTICAL PROPERTIES; STYRENE; SURFACES; THIN FILMS;

BLOCK COPOLYMERS;

EID: 84888882929     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn403616r     Document Type: Article

References (79)

1. Hillmyer, M. A. Nanoporous Materials from Block Copolymer Precursors Adv. Polym. Sci. 2005, 190, 137-181
2. Xin-Yu, B.; He, Y.; Bencher, C.; Li-Wen, C.; Huixiong, D.; Yongmei, C.; Chen, P. T. J.; Wong, H. S. P. In SRAM, NAND, DRAM Contact Hole Patterning Using Block Copolymer Directed Self-Assembly Guided by Small Topographical Templates; 2011 IEEE International Electron Devices Meeting (IEDM), 5-7 Dec. 2011; 2011; pp 7.7.1-7.7.4.
3. Ruiz, R.; Kang, H.; Detcheverry, F. A.; Dobisz, E.; Kercher, D. S.; Albrecht, T. R.; de Pablo, J. J.; Nealey, P. F. Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly Science 2008, 321, 936-939
4. Bradford, E. B.; Vanzo, E. Ordered Structures of Styrene-Butadiene Block Copolymers in the Solid State J. Polym. Sci., Part A: Polym. Chem. 1968, 6, 1661-1670
5. Vanzo, E. Ordered Structures of Styrene-Butadiene Block Copolymers J. Polym. Sci., Part A: Polym. Chem. 1966, 4, 1727-1730
6. Clark, D. T.; Peeling, J.; O'Malley, J. M. Application of ESCA to Polymer Chemistry. VIII. Surface Structures of AB Block Copolymers of Polydimethylsiloxane and Polystyrene J. Polym. Sci.: Polym. Chem. Ed. 1976, 14, 543-551
7. Green, P. F.; Christensen, T. M.; Russell, T. P.; Jerome, R. Surface Interaction in Solvent-Cast Polystyrene-Poly(methyl methacrylate) Diblock Copolymers Macromolecules 1989, 22, 2189-2194
8. Thomas, H. R.; O'Malley, J. J. Surface Studies on Multicomponent Polymer Systems by X-ray Photoelectron Spectroscopy. Polystyrene/Poly(ethylene oxide) Diblock Copolymers Macromolecules 1979, 12, 323-329
9. Henkee, C. S.; Thomas, E. L.; Fetters, L. J. The Effect of Surface Constraints on the Ordering of Block Copolymer Domains J. Mater. Sci. 1988, 23, 1685-1694
10. Coulon, G.; Russell, T. P.; Deline, V. R.; Green, P. F. Surface-Induced Orientation of Symmetric, Diblock Copolymers: A Secondary Ion Mass-Spectrometry Study Macromolecules 1989, 22, 2581-2589
11. Russell, T. P.; Coulon, G.; Deline, V. R.; Miller, D. C. Characteristics of the Surface-Induced Orientation for Symmetric Diblock PS/PMMA Copolymers Macromolecules 1989, 22, 4600-4606
12. Coulon, G.; Collin, B.; Ausserre, D.; Chatenay, D.; Russell, T. P. Islands and Holes on the Free Surface of Thin Diblock Copolymer Films. I. Characteristics of Formation and Growth J. Phys. (Paris) 1990, 51, 2801-2811
13. Coulon, G.; Ausserre, D.; Russell, T. P. Interference Microscopy on Thin Diblock Copolymer Films J. Phys. (Paris) 1990, 51, 777-786 (Pubitemid 21736941)
14. Strobel, M.; Lyons, C. S. An Essay on Contact Angle Measurements Plasma Processes Polym. 2011, 8, 8-13
15. Mansky, P.; Russell, T. P.; Hawker, C. J.; Pitsikalis, M.; Mays, J. Ordered Diblock Copolymer Films on Random Copolymer Brushes Macromolecules 1997, 30, 6810-6813
16. Peters, R. D.; Yang, X. M.; Kim, T. K.; Sohn, B. H.; Nealey, P. F. Using Self-Assembled Monolayers Exposed to X-rays To Control the Wetting Behavior of Thin Films of Diblock Copolymers Langmuir 2000, 16, 4625-4631
17. Smith, A. P.; Sehgal, A.; Douglas, J. F.; Karim, A.; Amis, E. J. Combinatorial Mapping of Surface Energy Effects on Diblock Copolymer Thin Film Ordering Macromol. Rapid Commun. 2003, 24, 131-135
18. Mansky, P.; Liu, Y.; Huang, E.; Russell, T. P.; Hawker, C. Controlling Polymer-Surface Interactions with Random Copolymer Brushes Science 1997, 275, 1458-1460 (Pubitemid 27111289)
19. Ryu, D. Y.; Shin, K.; Drockenmuller, E.; Hawker, C. J.; Russell, T. P. A Generalized Approach to the Modification of Solid Surfaces Science 2005, 308, 236-239 (Pubitemid 40558855)
20. Huang, E.; Rockford, L.; Tussell, T. P.; Hawker, C. J. Nanodomain Control in Copolymer Thin Films Nature 1998, 395, 757-758 (Pubitemid 28485433)
21. Mansky, P.; Russell, T. P.; Hawker, C. J.; Mays, J.; Cook, D. C.; Satija, S. K. Interfacial Segregation in Disordered Block Copolymers: Effect of Tunable Surface Potentials Phys. Rev. Lett. 1997, 79, 237-240 (Pubitemid 127647488)
22. Keen, I.; Yu, A.; Cheng, H.-H.; Jack, K. S.; Nicholson, T. M.; Whittaker, A. K.; Blakey, I. Control of the Orientation of Symmetric Poly(Styrene)-block- Poly(d, l-Lactide) Block Copolymers Using Statistical Copolymers of Dissimilar Composition Langmuir 2012, 28, 15876-15888
23. Kim, S.; Nealey, P. F.; Bates, F. S. Decoupling Bulk Thermodynamics and Wetting Characteristics of Block Copolymer Thin Films ACS Macro Lett. 2012, 1, 11-14
24. Bates, C. M.; Seshimo, T.; Maher, M. J.; Durand, W. J.; Cushen, J. D.; Dean, L. M.; Blachut, G.; Ellison, C. J.; Willson, C. G. Polarity-Switching Top Coats Enable Orientation of Sub-10-nm Block Copolymer Domains Science 2012, 338, 775-779
25. Jung, Y. S.; Ross, C. A. Orientation-Controlled Self-Assembled Nanolithography Using a Polystyrene-Polydimethylsiloxane Block Copolymer Nano Lett. 2007, 7, 2046-2050 (Pubitemid 47197590)
26. Cushen, J. D.; Bates, C. M.; Rausch, E. L.; Dean, L. M.; Zhou, S. X.; Willson, C. G.; Ellison, C. J. Thin Film Self-Assembly of Poly(trimethylsilylstyrene-b-d, l-Lactide) with Sub-10 nm Domains Macromolecules 2012, 45, 8722-8728
27. Smith, A. P.; Douglas, J. F.; Meredith, J. C.; Amis, E. J.; Karim, A. Combinatorial Study of Surface Pattern Formation in Thin Block Copolymer Films Phys. Rev. Lett. 2001, 87, 015503/1-015503/4 (Pubitemid 32636750)
28. Han, E.; Kang, H.; Liu, C.-C.; Nealey, P. F.; Gopalan, P. Graphoepitaxial Assembly of Symmetric Block Copolymers on Weakly Preferential Substrates Adv. Mater. 2010, 22, 4325-4329
29. Pickett, G. T.; Balazs, A. C. Equilibrium Orientation of Confined Diblock Copolymer Films Macromolecules 1997, 30, 3097-3103 (Pubitemid 127579452)
30. Yang, X. M.; Peters, R. D.; Nealey, P. F.; Solak, H. H.; Cerrina, F. Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates Macromolecules 2000, 33, 9575-9582 (Pubitemid 32091670)
31. Coulon, G.; Russell, T. P.; Deline, V. R.; Green, P. F. Surface-Induced Orientation of Symmetric, Diblock Copolymers: A Secondary Ion Mass-Spectrometry Study Macromolecules 1989, 22, 2581-2589
32. Maaloum, M.; Ausserre, D.; Chatenay, D.; Coulon, G.; Gallot, Y. Edge Profile of Relief 2D Domains at the Free Surface of Smectic Copolymer Thin Films Phys. Rev. Lett. 1992, 68, 1575-1578
33. Joly, S.; Raquois, A.; Paris, F.; Hamdoun, B.; Auvray, L.; Ausserre, D. Early Stage of Spinodal Decomposition in 2D Phys. Rev. Lett. 1996, 77, 4394-4397 (Pubitemid 126627651)
34. Maaloum, M.; Ausserre, D.; Chatenay, D.; Gallot, Y. Spinodal- Decomposition-like Patterns via Metastable State Relaxation Phys. Rev. Lett. 1993, 70, 2577-2580
35. Cahn, J. W. Spinodal Decomposition Trans. Metall. Soc. AIME 1968, 242, 166-180
36. Huang, J. S.; Goldburg, W. I.; Bjerkaas, A. W. Phase Separation in a Critical Binary Liquid Mixture. Spinodal Decomposition Phys. Rev. Lett. 1974, 32, 921-923
37. Hashimoto, T.; Kumaki, J.; Kawai, H. Time-Resolved Light-Scattering- Studies on Kinetics of Phase-Separation and Phase Dissolution of Polymer Blends. 1. Kinetics of Phase-Separation of a Binary Mixture of Polystyrene and Poly(vinyl methyl-ether) Macromolecules 1983, 16, 641-648
38. Jones, R. A. L.; Norton, L. J.; Kramer, E. J.; Bates, F. S.; Wiltzius, P. Surface-Directed Spinodal Decomposition Phys. Rev. Lett. 1991, 66, 1326-1329
39. Krausch, G.; Dai, C.-A.; Kramer, E. J.; Bates, F. S. Spinodal Decomposition in Thin Polymer Films Ber. Bunsen-Ges. 1994, 98, 446-448
40. Shull, K. R. Mean-Field Theory of Block Copolymers: Bulk Melts, Surfaces, and Thin-Films Macromolecules 1992, 25, 2122-2133
41. Walton, D. G.; Kellogg, G. J.; Mayes, A. M.; Lambooy, P.; Russell, T. P. A Free-Energy Model for Confined Diblock Copolymers Macromolecules 1994, 27, 6225-6228
42. Koneripalli, N.; Singh, N.; Levicky, R.; Bates, F. S.; Gallagher, P. D.; Satija, S. K. Confined Block-Copolymer Thin-Films Macromolecules 1995, 28, 2897-2904
43. Lambooy, P.; Russell, T. P.; Kellogg, G. J.; Mayers, A. M.; Gallagher, P. D.; Satija, S. K. Observed Frustration in Confined Block Copolymers Phys. Rev. Lett. 1994, 72, 2899-2902 (Pubitemid 24975284)
44. Singh, N.; Kudrle, A.; Sikka, M.; Bates, F. S. Surface Topography of Symmetric and Asymmetric Polyolefin Block Copolymer Films J. Phys. II 1995, 5, 377-396
45. Vignaud, G.; Gibaud, A.; Grubel, G.; Joly, S.; Ausserre, D.; Legrand, J. F.; Gallot, Y. Ordering of Diblock PS-PBMA Thin Films: An X-ray Reflectivity Study Physica B 1998, 248, 250-257 (Pubitemid 128431275)
46. Fredrickson, G. H. Surface Ordering Phenomena in Block Copolymer Melts Macromolecules 1987, 20, 2535-2542
47. Russell, T. P.; Coulon, G.; Deline, V. R.; Miller, D. C. Characteristics of the Surface-Induced Orientation for Symmetric Diblock PS/PMMA Copolymers Macromolecules 1989, 22, 4600-4606
48. Grim, P. C. M.; Nyrkova, I. A.; Semenov, A. N.; ten Brinke, G.; Hadziioannou, G. The Free-Surface of Thin Diblock Copolymer Films: Experimental and Theoretical Investigations on the Formation and Growth of Surface-Relief Structures Macromolecules 1995, 28, 7501-7513
49. Bassereau, P.; Brodbreck, D.; Russell, T. P.; Brown, H. R.; Shull, K. R. Topological Coarsening of Symmetric Diblock Copolymer Films: Model 2D Systems Phys. Rev. Lett. 1993, 71, 1716-1719
50. Ausserre, D.; Chatenay, D.; Coulon, G.; Collin, B. Growth of Two-Dimensional Domains in Copolymer Thin Films J. Phys. (Paris) 1990, 51, 2571-2580 (Pubitemid 21730477)
51. Mayes, A. M.; Russell, T. P.; Bassereau, P.; Baker, S. M.; Smith, G. S. Evolution of Order in Thin Block-Copolymer Films Macromolecules 1994, 27, 749-755
52. Collin, B.; Chatenay, D.; Coulon, G.; Ausserre, D.; Gallot, Y. Ordering of Copolymer Thin-Films As Revealed by Atomic Force Microscopy Macromolecules 1992, 25, 1621-1622
53. Turner, M. S.; Maaloum, M.; Ausserre, D.; Joanny, J. F.; Kunz, M. Edge Dislocations in Copolymer Lamellar Films J. Phys. II 1994, 4, 689-702
54. Carvalho, B. L.; Thomas, E. L. Morphology of Steps in Terraced Block Copolymer Films Phys. Rev. Lett. 1994, 73, 3321-3324 (Pubitemid 24976221)
55. Gido, S. P.; Gunther, J.; Thomas, E. L.; Hoffman, D. Lamellar Diblock Copolymer Grain-Boundary Morphology. 1. Twist Boundary Characterization Macromolecules 1993, 26, 4506-4520
56. Bates, F. S.; Wiltzius, P. Spinodal Decomposition of a Symmetric Critical Mixture of Deuterated and Protonated Polymer J. Chem. Phys. 1989, 91, 3258-3274
57. Hashimoto, T.; Takenaka, M.; Jinnai, H. Scattering Studies of Self-Assembling Processes of Polymer Blends in Spinodal Decomposition J. Appl. Crystallogr. 1991, 24, 457-466
58. Khandpur, A. K.; Forster, S.; Bates, F. S.; Hamley, I. W.; Ryan, A. J.; Bras, W.; Almdal, K.; Mortensen, K. Polyisoprene-Polystyrene Diblock Copolymer Phase Diagram near the Order-Disorder Transition Macromolecules 1995, 28, 8796-8806
59. Liu, Y.; Rafailovich, M. H.; Sokolov, J.; Schwarz, S. A.; Bahal, S. Effects of Surface Tension on the Dislocation Structures of Diblock Copolymers Macromolecules 1996, 29, 899-906 (Pubitemid 126531432)
60. Hashimoto, T.; Takenaka, M.; Izumitani, T. Spontaneous Pinning of Domain Growth during Spinodal Decomposition of Off-Critical Polymer Mixtures J. Chem. Phys. 1992, 97, 679-689
61. Sung, L.; Karim, A.; Douglas, J. F.; Han, C. C. Dimensional Crossover in the Phase Separation Kinetics of Thin Polymer Blend Films Phys. Rev. Lett. 1996, 76, 4368-4371 (Pubitemid 126639078)
62. Jain, S.; Bates, F. S. Consequences of Nonergodicity in Aqueous Binary PEO-PB Micellar Dispersions Macromolecules 2004, 37, 1511-1523
63. Lee, S.; Arunagirinathan, M. A.; Bates, F. S. Path-Dependent Morphologies in Oil/Water/Diblock Copolymer Mixtures Langmuir 2010, 26, 1707-1715
64. Shibayama, M.; Hashimoto, T.; Kawai, H. Ordered Structure in Block Polymer-Solutions. 5. Equilibrium and Non-equilibrium Aspects of Microdomain Formation Macromolecules 1983, 16, 1434-1443
65. Smith, A. P.; Douglas, J. F.; Meredith, J. C.; Amis, E. J.; Karim, A. High-Throughput Characterization of Pattern Formation in Symmetric Diblock Copolymer Films J. Polym. Sci., Part B: Polym. Phys. 2001, 39, 2141-2158 (Pubitemid 32828606)
66. Coulon, G.; Collin, B.; Chatenay, D.; Gallot, Y. Kinetics of Growth of Islands and Holes on the Free Surface of Thin Diblock Copolymer Films J. Phys. II 1993, 3, 697-717
67. Sinturel, C.; Vayer, M.; Morris, M.; Hillmyer, M. A. Solvent Vapor Annealing of Block Polymer Thin Films Macromolecules 2013, 46, 5399-5415
68. Zhang, L. F.; Eisenberg, A. Multiple Morphologies of Crew-Cut Aggregates of Polystyrene-b-Poly(acrylic acid) Block-Copolymers Science 1995, 268, 1728-1731
69. Dalvi, M. C.; Lodge, T. P. Parallel and Perpendicular Chain Diffusion in a Lamellar Block Copolymer Macromolecules 1993, 26, 859-861
70. Hamersky, M. W.; Tirrell, M.; Lodge, T. P. Anisotropy of Diffusion in a Lamellar Styrene-Isoprene Block Copolymer Langmuir 1998, 14, 6974-6979 (Pubitemid 128585011)
71. Poh, B. T.; Tan, B. K. Mooney Scorch Time of Epoxidized Natural Rubber J. Appl. Polym. Sci. 1991, 42, 1407-1416
72. Gelling, I. R. Modification of Natural Rubber Latex with Peracetic Acid Rubber Chem. Technol. 1985, 58, 86-96 (Pubitemid 15477253)
73. Gnecco, S.; Pooley, A.; Krause, M. Epoxidation of Low-Molecular Weight Euphorbia lactiflua Natural Rubber with In Situ Formed Performic Acid Polym. Bull. 1996, 37, 609-615 (Pubitemid 126463821)
74. Han, E.; Stuen, K. O.; La, Y. H.; Nealey, P. F.; Gopalan, P. Effect of Composition of Substrate-Modifying Random Copolymers on the Orientation of Symmetric and Asymmetric Diblock Copolymer Domains Macromolecules 2008, 41, 9090-9097
75. Bang, J.; Bae, J.; Lowenhielm, P.; Spiessberger, C.; Given-Beck, S. A.; Russell, T. P.; Hawker, C. J. Facile Routes to Patterned Surface Neutralization Layers for Block Copolymer Lithography Adv. Mater. 2007, 19, 4552-4557
76. Bates, C. M.; Strahan, J. R.; Santos, L. J.; Mueller, B. K.; Bamgbade, B. O.; Lee, J. A.; Katzenstein, J. M.; Ellison, C. J.; Willson, C. G. Polymeric Cross-Linked Surface Treatments for Controlling Block Copolymer Orientation in Thin Films Langmuir 2011, 27, 2000-2006
77. Kennemur, J. G.; Hillmyer, M. A.; Bates, F. S. Synthesis, Thermodynamics, and Dynamics of Poly(4-tert-butylstyrene-b-methyl methacrylate) Macromolecules 2012, 45, 7228-7236
78. Rehse, N.; Knoll, A.; Magerle, R.; Krausch, G. Surface Reconstructions of Lamellar ABC Triblock Copolymer Mesostructures Macromolecules 2003, 36, 3261-3271
79. Fasolka, M. J.; Mayes, A. M.; Magonov, S. N. Thermal Enhancement of AFM Phase Contrast for Imaging Diblock Copolymer Thin Film Morphology Ultramicroscopy 2001, 90, 21-31 (Pubitemid 33101106)