Development of a numerically controlled Elastic Emission Machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8848, Issue , 2013, Pages

  Takei, Yoshinori ^a   Kume, Takehiro ^a   Motoyama, Hiroto ^a   Hiraguri, Kentaro ^b   Hashizume, Hirokazu ^b   Mimura, Hidekazu ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b Natsume Optical Corp   (Japan)

Author keywords

Elastic Emission Machining; Ellipsoidal mirror; Figure correction processing; Ni electroforming; Numerically controlled processing; Optical fabrication

Indexed keywords

CHROMATIC ABERRATION; ELASTIC EMISSION MACHINING; ELLIPSOIDAL MIRRORS; FIGURE CORRECTION; MANUFACTURING METHODS; MANUFACTURING PROCESS; OPTICAL FABRICATION; SOFT X-RAY MICROSCOPY;

ABERRATIONS; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; GRINDING (MACHINING); MANUFACTURE; SURFACE ROUGHNESS; X RAYS;

MIRRORS;

EID: 84888856647     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2023940     Document Type: Conference Paper

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