Fabrication of a 400-mm-long mirror for focusing X-ray free-electron lasers to sub-100 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7077, Issue , 2008, Pages

  Mimura, Hidekazu ^a   Morita, Shinya ^b   Kimura, Takashi ^a   Yamakawa, Daisuke ^a   Lin, Weimin ^c   Uehara, Yoshihiro ^b   Yumoto, Hirokatsu ^d   Matsuyama, Satoshi ^a   Nishino, Yoshinori ^e   Tamasaku, Kenji ^e   Ohashi, Haruhiko ^d   Yabashi, Makina ^d,e   Ishikawa, Tetsuya ^d,e   Ohmori, Hitoshi ^b   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

^b RIKEN   (Japan)

^c AKITA PREFECTURAL UNIVERSITY   (Japan)

^d JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^e RIKEN SPring 8 Center   (Japan)

Author keywords

EEM; ELID grinding; MSI; On machine measurement; RADSI; X ray mirror; XFEL

Indexed keywords

FOCUSING; FREE ELECTRON LASERS; GRINDING (COMMINUTION); GRINDING (MACHINING); LASERS; X RAY LASERS;

EEM; ELID GRINDING; MSI; ON-MACHINE MEASUREMENT; RADSI; X-RAY MIRROR; XFEL;

MIRRORS;

EID: 56249108714     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.795643     Document Type: Conference Paper

References (21)

1. W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, "Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobes", Rev. Sci. Instrum. 76, 113701 (2005).
2. O. Hignette, P. Cloetens, G. Rostaing, P. Bernard, and C. Morawe, "Efficient sub 100 nm focusing of hard x rays" , Rev. Sci, Instrum. 76, 063709 (2005).
3. H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa and K. Yamauchi, "Efficient focusing of hard X-rays to 25nm by a total reflection mirror" , Appl. Phys. Lett. 90, 051903 (2007).
4. C.G. Schroer et al, " Hard x-ray nanoprobe based on refractive x-ray lenses", Appl. Phys. Lett. 82, 3360(2003).
5. H. C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, " Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens ", Phy. Rev. Lett. 96, 127401 (2006).
6. P. Kirkpatrick and A.V. Baez, Formation of Optical Images by X-Rays, J. Opt. Soc. Am. 38, 766(1948).
7. "XFEL: The European X-Ray Free-Electron Laser. Technical Design Report, " Preprint DESY 2006-097, (DESY, Hamburg, 2006) (see also http://xfel.desy.de).
8. "Linac Coherent Light Source (LCLS). Conceptual Design Report. SLAC- R593" (Stanford, 2002) (see also 〈http://www-ssrl.slac. stanford.edu/lcls/cdr〉).
9. "SCSS X-FEL Conceptual Design Report" (Riken Harima Institute, Hyogo, Japan,) 2005 (see also 〈http://www-xfel.spring8.or. jp〉).
10. W. Ackermann et al., " Operation of a free-electron laser from the extreme ultraviolet to the water window", Nature Photonics, 1, 336-342 (2007).
11. R. Tatchyn, "LCLS Optics: Technological Issues and Scientific Opportunities," in Proceedings of the Workshop on Scientific Applications of Short Wavelength Coherent Light Sources, SLAC Report 414; SLAC-PUB 6064, March 1993.
12. T. Ishikawa, K. Tamasaku, M. Yabashi, S. Goto, Y. Tanaka, H. Yamazaki, K. Takeshita, H. Kimura, H. Ohashi, T. Matsushita and T. Ohata, "One kilometer beamline. at SPring-8", Proc. SPIE, 4145 ,1 (2001).
13. K. Tamasaku, Y. Tanaka, M. Yabashi, H. Yamazaki, N. Kawamura, M. Suzuki and T. Ishikawa, SPring-8 RIKEN beamline III for coherent X-ray optics, Nucl. Instrum. & Methods 467-468, 686(2001).
14. K. Yamauchi, H. Mimura, K. Inagaki and Y. Mori, "Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining", Rev. Sci. Instrum. 73 (2002) 4028.
15. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa and Y. Mori, et al., "Wave-optical evaluation of interference fringes and wavefront phase in a hard-x-ray beam totally reflected by mirror optics", Appl. Opt.. 44, 6927-6932(2005).
16. H. Ohmori and T. Nakagawa, "Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing", ANNALS of the CIRP 39, 329 (1990).
17. H. Ohmori, Y. Yamagara, S. Moriyasu, S. Morita and W. Lin, "Development of Large Ultraprecision Grinding System with ELID for Aspheric Optical Elements and Components", Proceedings of the 9th International Conference on Precision Science and Technology for Perfect Surfaces (9th ICPE), 147.
18. S. Moriyasu, S. Morita, Y. Yamagata, H. Ohmori, J. Kato, I. Yamaguchi A. Makinouchi, " Developmentment of ultraprecision contact-type form measuring probe for on-machine measurment",Proceedings of the 9th International Conference on Precision Science and Technology for Perfect Surfaces (9th ICPE), 366.
19. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa and Y. Mori, "Microstitching interferometry for x-ray reflective optics", Rev. Sci. Instrum. 74, 2894(2003).
20. H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa and K. Yamauchi, "Relative angle determinable stitching interferometry for hard x-ray reflective optics", Rev. Sci. Instrum. 76, 045102 (2005).
21. H. Ohashi, T. Tsumura, H. Okada, H. Mimura, T. Masunaga, Y. Senba, S. Goto, K. Yamauchi, and T. Ishikawa, "Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long x-ray mirror", Proc. SPIE 6704, 670405 (2007).