Development of surface profile measurement method for ellipsoidal X-ray mirrors using phase retrieval

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8501, Issue , 2012, Pages

  Saito, Takahiro ^a   Takei, Yoshinori ^a   Mimura, Hidekazu ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Ellipsoidal mirror; Phase retrieval; X ray focusing; X ray mirror

Indexed keywords

CHROMATIC ABERRATION; ELLIPSOIDAL MIRRORS; HE-NE LASERS; LARGE APERTURE; MANUFACTURING METHODS; NANOMETER SIZE; PHASE RETRIEVAL; SOFT X-RAY; SURFACE FIGURE; SURFACE PROFILE MEASUREMENTS; WAVEFRONT MEASUREMENT; X RAY MIRRORS; X-RAY FOCUSING;

ABERRATIONS; MIRRORS; OPTICAL DESIGN; OPTICAL SYSTEMS; PHASE SHIFTERS; UNITS OF MEASUREMENT;

X RAYS;

EID: 84872508971     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.930340     Document Type: Conference Paper

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