Development of nanometer level accurate computer-controlled figuring with high spatial resolution and its application to hard X-ray focusing mirror

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 76, Issue 3, 2010, Pages 338-342

  Mimura, Hidekazu ^a   Yumoto, Hirokatsu ^a   Matsuyama, Satoshi ^a   Sano, Yasuhisa ^a   Yamauchi, Kazuto ^a  

^a NONE

Author keywords

Aspherical mirror; Interferometer; Stitching; Ultraprecision machining; X ray mirror

Indexed keywords

ASPHERICAL MIRROR; ASPHERICAL MIRRORS; BEAM LINES; ELASTIC EMISSION MACHINING; FIGURE MEASUREMENT; FOCUSED BEAMS; HARD-X-RAY FOCUSING; HIGH FREQUENCY; HIGH SPATIAL RESOLUTION; LINE PROFILES; LOW BACKGROUND; MACHINING METHODS; MICROSTITCHING INTERFEROMETRY; NANOMETER LEVEL; REMOVAL DEPTH; SPATIAL RESOLUTION; SPRING-8; ULTRAPRECISION MACHINING; X RAY MIRRORS;

COMPUTER CONTROL SYSTEMS; FOCUSING; IMAGE QUALITY; IMAGE RESOLUTION; INTERFEROMETERS; MACHINING; NOZZLES; X RAYS;

MIRRORS;

EID: 77955455094     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.76.338     Document Type: Article

References (14)

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